JPS61206671U - - Google Patents

Info

Publication number
JPS61206671U
JPS61206671U JP7732986U JP7732986U JPS61206671U JP S61206671 U JPS61206671 U JP S61206671U JP 7732986 U JP7732986 U JP 7732986U JP 7732986 U JP7732986 U JP 7732986U JP S61206671 U JPS61206671 U JP S61206671U
Authority
JP
Japan
Prior art keywords
regulating
opening
metal
vapor deposition
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7732986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0114678Y2 (ar
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986077329U priority Critical patent/JPH0114678Y2/ja
Publication of JPS61206671U publication Critical patent/JPS61206671U/ja
Application granted granted Critical
Publication of JPH0114678Y2 publication Critical patent/JPH0114678Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
JP1986077329U 1986-05-22 1986-05-22 Expired JPH0114678Y2 (ar)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986077329U JPH0114678Y2 (ar) 1986-05-22 1986-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986077329U JPH0114678Y2 (ar) 1986-05-22 1986-05-22

Publications (2)

Publication Number Publication Date
JPS61206671U true JPS61206671U (ar) 1986-12-27
JPH0114678Y2 JPH0114678Y2 (ar) 1989-04-28

Family

ID=30620298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986077329U Expired JPH0114678Y2 (ar) 1986-05-22 1986-05-22

Country Status (1)

Country Link
JP (1) JPH0114678Y2 (ar)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS453063Y1 (ar) * 1966-10-19 1970-02-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS453063Y1 (ar) * 1966-10-19 1970-02-10

Also Published As

Publication number Publication date
JPH0114678Y2 (ar) 1989-04-28

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