JPS61206650U - - Google Patents
Info
- Publication number
- JPS61206650U JPS61206650U JP8953185U JP8953185U JPS61206650U JP S61206650 U JPS61206650 U JP S61206650U JP 8953185 U JP8953185 U JP 8953185U JP 8953185 U JP8953185 U JP 8953185U JP S61206650 U JPS61206650 U JP S61206650U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- chamber
- processing chamber
- vacuum pump
- install
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8953185U JPH0417552Y2 (ru) | 1985-06-13 | 1985-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8953185U JPH0417552Y2 (ru) | 1985-06-13 | 1985-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61206650U true JPS61206650U (ru) | 1986-12-27 |
| JPH0417552Y2 JPH0417552Y2 (ru) | 1992-04-20 |
Family
ID=30643696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8953185U Expired JPH0417552Y2 (ru) | 1985-06-13 | 1985-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417552Y2 (ru) |
-
1985
- 1985-06-13 JP JP8953185U patent/JPH0417552Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0417552Y2 (ru) | 1992-04-20 |