JPS61205758U - - Google Patents
Info
- Publication number
- JPS61205758U JPS61205758U JP1985088229U JP8822985U JPS61205758U JP S61205758 U JPS61205758 U JP S61205758U JP 1985088229 U JP1985088229 U JP 1985088229U JP 8822985 U JP8822985 U JP 8822985U JP S61205758 U JPS61205758 U JP S61205758U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- surface plate
- rotary plate
- drive motor
- rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000872 buffer Substances 0.000 claims 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Description
第１図はこの考案の一実施例による研磨装置の
全体的構成を示す正面図、第２図は第１図におけ
る回転板とワークホルダとの結合構造の詳細を示
す拡大正面図である。
Ｗ……ワーク、１０……定盤、１２……テーブ
ル、１４……定盤駆動モータ、１６……ガイドポ
スト、１８……スライダ、２２……ワーク駆動モ
ータ、２４……回転板、２６……ワークホルダ、
２８……ピボツト、３２……駆動ピン。
FIG. 1 is a front view showing the overall configuration of a polishing apparatus according to an embodiment of the invention, and FIG. 2 is an enlarged front view showing details of the coupling structure between the rotary plate and the work holder in FIG. 1. W... Work, 10... Surface plate, 12... Table, 14... Surface plate drive motor, 16... Guide post, 18... Slider, 22... Work drive motor, 24... Rotating plate, 26... ...work holder,
28... Pivot, 32... Drive pin.
Claims (1)
に配設された定盤と、この定盤を回転駆動する定
盤駆動モータと、上記テーブル上に垂直方向に摺
動変位するように設けられた上下摺動機構と、こ
の上下摺動機構の可動部に搭載されたワーク駆動
モータと、上記定盤の回転軸とは偏心した垂直な
軸を中心に回転自在に上記可動部に取付けられ、
上記ワーク駆動モータによつて回転駆動される回
転板と、ワーク装着面を上記定盤の上面に対向さ
せた状態で上記回転板の下面側に配置され、上記
回転板と一体的に回転し、かつ軸方向荷重を緩衝
する構造で上記回転板に結合されたワークホルダ
とを備えた研磨装置。 A surface plate horizontally disposed on a table so as to be rotatable about a vertical axis, a surface plate drive motor that rotationally drives this surface plate, and a surface plate disposed horizontally on a table so as to be slidably displaced in a vertical direction on the table. a vertical sliding mechanism, a work drive motor mounted on the movable part of the vertical sliding mechanism, and a rotating shaft of the surface plate, which is attached to the movable part so as to be rotatable about an eccentric vertical axis,
a rotary plate rotationally driven by the workpiece drive motor; and a rotary plate arranged on the lower surface side of the rotary plate with the workpiece mounting surface facing the upper surface of the surface plate, and rotates integrally with the rotary plate; and a work holder coupled to the rotary plate with a structure that buffers axial loads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985088229U JPS61205758U (en) | 1985-06-13 | 1985-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985088229U JPS61205758U (en) | 1985-06-13 | 1985-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61205758U true JPS61205758U (en) | 1986-12-25 |
Family
ID=30641170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985088229U Pending JPS61205758U (en) | 1985-06-13 | 1985-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61205758U (en) |
-
1985
- 1985-06-13 JP JP1985088229U patent/JPS61205758U/ja active Pending
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