JPS61205153U - - Google Patents

Info

Publication number

JPS61205153U

JPS61205153U JP8981686U JP8981686U JPS61205153U JP S61205153 U JPS61205153 U JP S61205153U JP 8981686 U JP8981686 U JP 8981686U JP 8981686 U JP8981686 U JP 8981686U JP S61205153 U JPS61205153 U JP S61205153U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

insulating film

impurity

doped region

thickness

Prior art date

1986-06-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 12
• 239000000758 substrate Substances 0.000 claims description 10
• 239000012535 impurity Substances 0.000 claims description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
• 229910052782 aluminium Inorganic materials 0.000 description 3
• 229910052710 silicon Inorganic materials 0.000 description 3
• 239000010703 silicon Substances 0.000 description 3