JPS61205140U - - Google Patents
Info
- Publication number
- JPS61205140U JPS61205140U JP8978885U JP8978885U JPS61205140U JP S61205140 U JPS61205140 U JP S61205140U JP 8978885 U JP8978885 U JP 8978885U JP 8978885 U JP8978885 U JP 8978885U JP S61205140 U JPS61205140 U JP S61205140U
- Authority
- JP
- Japan
- Prior art keywords
- sample stand
- support part
- stand support
- magnetism
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005389 magnetism Effects 0.000 claims 2
- 239000000523 sample Substances 0.000 description 3
Landscapes
- Measuring Leads Or Probes (AREA)
Description
第１図は本考案の実施例の縦断面図である。
１……被試験物、２……試料台、３……試料台
支持部、４……シリンダ部、５……Ｚ軸駆動部、
６……ＸＹテーブル、７……プローブ、８……測
定系。
FIG. 1 is a longitudinal sectional view of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Test object, 2... Sample stand, 3... Sample stand support part, 4... Cylinder part, 5... Z-axis drive part,
6...XY table, 7...probe, 8...measuring system.
Claims (1)
一極性の磁性を有する試料台支持部と、前記試料
台支持部を囲みその内周部が前記試料台支持部の
外周部と同じ極極の磁性を有するシリンダ部と、
前記試料台及び前記試料台支持部をＺ軸方向に駆
動するＺ軸駆動部とを備えることを特徴とするプ
ローバ。 A sample stand on which a test object is mounted, a sample stand support part whose outer periphery has a single polarity magnetism, and a sample stand support part that surrounds the sample stand support part and whose inner periphery has the same polarity as the outer periphery of the sample stand support part. a cylinder portion having magnetism;
A prober comprising: a Z-axis drive section that drives the sample stand and the sample stand support section in the Z-axis direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8978885U JPS61205140U (en) | 1985-06-14 | 1985-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8978885U JPS61205140U (en) | 1985-06-14 | 1985-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61205140U true JPS61205140U (en) | 1986-12-24 |
Family
ID=30644197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8978885U Pending JPS61205140U (en) | 1985-06-14 | 1985-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61205140U (en) |
-
1985
- 1985-06-14 JP JP8978885U patent/JPS61205140U/ja active Pending
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