JPS61205137U - - Google Patents

Info

Publication number
JPS61205137U
JPS61205137U JP8935285U JP8935285U JPS61205137U JP S61205137 U JPS61205137 U JP S61205137U JP 8935285 U JP8935285 U JP 8935285U JP 8935285 U JP8935285 U JP 8935285U JP S61205137 U JPS61205137 U JP S61205137U
Authority
JP
Japan
Prior art keywords
cleaning
supply pipe
upper limit
limit level
semiconductor devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8935285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8935285U priority Critical patent/JPS61205137U/ja
Publication of JPS61205137U publication Critical patent/JPS61205137U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8935285U 1985-06-13 1985-06-13 Pending JPS61205137U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8935285U JPS61205137U (US08063081-20111122-C00044.png) 1985-06-13 1985-06-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8935285U JPS61205137U (US08063081-20111122-C00044.png) 1985-06-13 1985-06-13

Publications (1)

Publication Number Publication Date
JPS61205137U true JPS61205137U (US08063081-20111122-C00044.png) 1986-12-24

Family

ID=30643345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8935285U Pending JPS61205137U (US08063081-20111122-C00044.png) 1985-06-13 1985-06-13

Country Status (1)

Country Link
JP (1) JPS61205137U (US08063081-20111122-C00044.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444472A (en) * 1977-09-14 1979-04-07 Nippon Telegr & Teleph Corp <Ntt> Cleaning unit of semiconductor substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444472A (en) * 1977-09-14 1979-04-07 Nippon Telegr & Teleph Corp <Ntt> Cleaning unit of semiconductor substrate

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