JPS61203267U - - Google Patents

Info

Publication number
JPS61203267U
JPS61203267U JP8652785U JP8652785U JPS61203267U JP S61203267 U JPS61203267 U JP S61203267U JP 8652785 U JP8652785 U JP 8652785U JP 8652785 U JP8652785 U JP 8652785U JP S61203267 U JPS61203267 U JP S61203267U
Authority
JP
Japan
Prior art keywords
compressor
helium
purification device
gas purification
compressor unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8652785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8652785U priority Critical patent/JPS61203267U/ja
Publication of JPS61203267U publication Critical patent/JPS61203267U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)
JP8652785U 1985-06-08 1985-06-08 Pending JPS61203267U (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8652785U JPS61203267U (ru) 1985-06-08 1985-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8652785U JPS61203267U (ru) 1985-06-08 1985-06-08

Publications (1)

Publication Number Publication Date
JPS61203267U true JPS61203267U (ru) 1986-12-20

Family

ID=30637921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8652785U Pending JPS61203267U (ru) 1985-06-08 1985-06-08

Country Status (1)

Country Link
JP (1) JPS61203267U (ru)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56138655A (en) * 1980-03-31 1981-10-29 Kobe Steel Ltd Cryocooler

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56138655A (en) * 1980-03-31 1981-10-29 Kobe Steel Ltd Cryocooler

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