JPS61202685U - - Google Patents

Info

Publication number

JPS61202685U

JPS61202685U JP8659985U JP8659985U JPS61202685U JP S61202685 U JPS61202685 U JP S61202685U JP 8659985 U JP8659985 U JP 8659985U JP 8659985 U JP8659985 U JP 8659985U JP S61202685 U JPS61202685 U JP S61202685U

Authority

JP

Japan

Prior art keywords

chemical liquid

liquid supply

chamber

supply device

liquid chamber

Prior art date

1985-06-07

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000007788 liquid Substances 0.000 claims description 6
• 239000000126 substance Substances 0.000 claims description 6
• 238000005192 partition Methods 0.000 claims 1
• 238000009499 grossing Methods 0.000 description 2
• 230000010349 pulsation Effects 0.000 description 1

Cited By (2)