JPS61202461U - - Google Patents
Info
- Publication number
- JPS61202461U JPS61202461U JP8487085U JP8487085U JPS61202461U JP S61202461 U JPS61202461 U JP S61202461U JP 8487085 U JP8487085 U JP 8487085U JP 8487085 U JP8487085 U JP 8487085U JP S61202461 U JPS61202461 U JP S61202461U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- frequency
- stone
- capacitor
- sputtering device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004575 stone Substances 0.000 claims description 5
- 239000003990 capacitor Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 230000000903 blocking effect Effects 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8487085U JPH0230443Y2 (pt) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8487085U JPH0230443Y2 (pt) | 1985-06-05 | 1985-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202461U true JPS61202461U (pt) | 1986-12-19 |
| JPH0230443Y2 JPH0230443Y2 (pt) | 1990-08-16 |
Family
ID=30634744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8487085U Expired JPH0230443Y2 (pt) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0230443Y2 (pt) |
-
1985
- 1985-06-05 JP JP8487085U patent/JPH0230443Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0230443Y2 (pt) | 1990-08-16 |