JPS61202068U - - Google Patents
Info
- Publication number
- JPS61202068U JPS61202068U JP8607385U JP8607385U JPS61202068U JP S61202068 U JPS61202068 U JP S61202068U JP 8607385 U JP8607385 U JP 8607385U JP 8607385 U JP8607385 U JP 8607385U JP S61202068 U JPS61202068 U JP S61202068U
- Authority
- JP
- Japan
- Prior art keywords
- measuring
- electrode
- measurement
- ion concentration
- cleaning chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Automatic Analysis And Handling Materials Therefor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985086073U JPH0413645Y2 (enExample) | 1985-06-06 | 1985-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985086073U JPH0413645Y2 (enExample) | 1985-06-06 | 1985-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202068U true JPS61202068U (enExample) | 1986-12-18 |
| JPH0413645Y2 JPH0413645Y2 (enExample) | 1992-03-30 |
Family
ID=30637042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985086073U Expired JPH0413645Y2 (enExample) | 1985-06-06 | 1985-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0413645Y2 (enExample) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52116985U (enExample) * | 1976-03-03 | 1977-09-05 | ||
| JPS53103786U (enExample) * | 1977-01-26 | 1978-08-21 | ||
| JPS59168155U (ja) * | 1983-04-26 | 1984-11-10 | 日本鉱業株式会社 | 電極洗浄装置 |
-
1985
- 1985-06-06 JP JP1985086073U patent/JPH0413645Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52116985U (enExample) * | 1976-03-03 | 1977-09-05 | ||
| JPS53103786U (enExample) * | 1977-01-26 | 1978-08-21 | ||
| JPS59168155U (ja) * | 1983-04-26 | 1984-11-10 | 日本鉱業株式会社 | 電極洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0413645Y2 (enExample) | 1992-03-30 |