JPS61201343U - - Google Patents
Info
- Publication number
- JPS61201343U JPS61201343U JP8503485U JP8503485U JPS61201343U JP S61201343 U JPS61201343 U JP S61201343U JP 8503485 U JP8503485 U JP 8503485U JP 8503485 U JP8503485 U JP 8503485U JP S61201343 U JPS61201343 U JP S61201343U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- ion source
- ions
- sample
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 5
- 238000001312 dry etching Methods 0.000 claims 2
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8503485U JPS61201343U (sl) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8503485U JPS61201343U (sl) | 1985-06-05 | 1985-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61201343U true JPS61201343U (sl) | 1986-12-17 |
Family
ID=30635060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8503485U Pending JPS61201343U (sl) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201343U (sl) |
-
1985
- 1985-06-05 JP JP8503485U patent/JPS61201343U/ja active Pending
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