JPS61201339U - - Google Patents
Info
- Publication number
- JPS61201339U JPS61201339U JP8549585U JP8549585U JPS61201339U JP S61201339 U JPS61201339 U JP S61201339U JP 8549585 U JP8549585 U JP 8549585U JP 8549585 U JP8549585 U JP 8549585U JP S61201339 U JPS61201339 U JP S61201339U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- chemical liquid
- wafer
- pure water
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549585U JPS61201339U (en, 2012) | 1985-06-06 | 1985-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8549585U JPS61201339U (en, 2012) | 1985-06-06 | 1985-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61201339U true JPS61201339U (en, 2012) | 1986-12-17 |
Family
ID=30635946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8549585U Pending JPS61201339U (en, 2012) | 1985-06-06 | 1985-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201339U (en, 2012) |
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1985
- 1985-06-06 JP JP8549585U patent/JPS61201339U/ja active Pending