JPS61201338U - - Google Patents
Info
- Publication number
- JPS61201338U JPS61201338U JP8503385U JP8503385U JPS61201338U JP S61201338 U JPS61201338 U JP S61201338U JP 8503385 U JP8503385 U JP 8503385U JP 8503385 U JP8503385 U JP 8503385U JP S61201338 U JPS61201338 U JP S61201338U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- cell
- ejection port
- ejected
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の実施例を示す断面図、第２図
は従来例を示す断面図である。
１……本体、２……分子線噴出口、５……ガス
導入ノズル。
FIG. 1 is a sectional view showing an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional example. 1...Main body, 2...Molecular beam jet port, 5...Gas introduction nozzle.
Claims (1)
て、上記噴出口より上記分子線の噴出方向と逆方
向にガスを導入するガス導入ノズルを備えたこと
を特徴とする分子線セル。 1. A molecular beam cell having a molecular beam ejection port at one end, the cell comprising a gas introduction nozzle for introducing gas from the ejection port in a direction opposite to the direction in which the molecular beam is ejected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8503385U JPS61201338U (en) | 1985-06-05 | 1985-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8503385U JPS61201338U (en) | 1985-06-05 | 1985-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61201338U true JPS61201338U (en) | 1986-12-17 |
Family
ID=30635058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8503385U Pending JPS61201338U (en) | 1985-06-05 | 1985-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61201338U (en) |
-
1985
- 1985-06-05 JP JP8503385U patent/JPS61201338U/ja active Pending
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