JPS61200699A - Charged particle accelerator - Google Patents
Charged particle acceleratorInfo
- Publication number
- JPS61200699A JPS61200699A JP4114485A JP4114485A JPS61200699A JP S61200699 A JPS61200699 A JP S61200699A JP 4114485 A JP4114485 A JP 4114485A JP 4114485 A JP4114485 A JP 4114485A JP S61200699 A JPS61200699 A JP S61200699A
- Authority
- JP
- Japan
- Prior art keywords
- high voltage
- insulating container
- charged particle
- particle accelerator
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は、荷電粒子加速装置に保り、局部微少放電の防
止に好適な荷電粒子加速装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a charged particle accelerator which can be maintained in a charged particle accelerator and is suitable for preventing local minute discharges.
従来の装置は、
高電圧発生部で発生した高電圧は、抵抗ケーブルを介し
て電子線加速部に印加された。第２図を用いて説明する
と高電圧は抵抗ケーブルｌから、ブッシング２を介して
高電圧絶縁容器６内の上部電極７に印加される。上部電
極７はスプリング３によシ多段加速管１１に接続されて
おシ高電圧分割抵抗９によシ高電圧が等分割されシール
ド電極８に印加される。多段加速管１１の内部は扁真空
に保持されておりシールド電極８と同電位である加速電
極１０がある。加速電極１０印加された電圧によシフィ
ラメント４で発生した電子を加速する。In the conventional device, the high voltage generated in the high voltage generator was applied to the electron beam accelerator via a resistance cable. To explain using FIG. 2, a high voltage is applied from a resistance cable l through a bushing 2 to an upper electrode 7 in a high voltage insulating container 6. The upper electrode 7 is connected to the multistage accelerator tube 11 by a spring 3, and the high voltage is equally divided by a high voltage dividing resistor 9 and applied to the shield electrode 8. The interior of the multistage accelerating tube 11 is maintained in a flat vacuum, and there is an accelerating electrode 10 having the same potential as the shield electrode 8. Electrons generated in the filament 4 are accelerated by the voltage applied to the accelerating electrode 10.
多段加速管１１と高電圧絶縁容器６の間にはフレオン１
，２等の絶縁ガスを封入している。Freon 1 is placed between the multistage accelerator tube 11 and the high voltage insulating container 6.
, 2, etc. are sealed.
高電圧絶縁容器６Ｖｉ、エポキシ系のモールド材であり
高電圧が印加されている上部電極７とアース間は、高電
圧絶縁容器６の沿面で絶縁されている。また高電圧絶縁
容器６の外側は導電塗料にょシ接地されている。A creeping surface of the high voltage insulating container 6 insulates between the high voltage insulating container 6Vi, the upper electrode 7, which is an epoxy molding material and to which a high voltage is applied, and the ground. Further, the outside of the high voltage insulating container 6 is grounded using conductive paint.
この様な従来方式では、高電圧を印加しｆｃ場合多段加
速管１１のシールド電極８および加速電極１０は瞬時に
高電圧分割抵抗により電位が定まるが、高電圧絶縁容器
６の沿面は外部アース電位面との間の容量インピーダン
スがあシ安定な電位分布まで時間遅れが生ずる。この時
、高電圧絶縁容器６の内面に電荷が集中すると微少放電
となりさらにこの微少放電により電位分布が乱れる。こ
のため高電圧絶縁容器６と多段加速管１１の絶縁距離を
大きくする必要が生ずる。これによｐ高電圧絶縁容器６
が大形になるという問題があった。In such a conventional method, when a high voltage is applied to fc, the potential of the shield electrode 8 and the acceleration electrode 10 of the multistage accelerator tube 11 is instantaneously determined by the high voltage dividing resistor, but the creeping surface of the high voltage insulating container 6 is at the external ground potential. If there is a capacitive impedance between the surface and the surface, a time delay will occur until the potential distribution becomes stable. At this time, if charges concentrate on the inner surface of the high-voltage insulating container 6, a minute discharge occurs, and the potential distribution is further disturbed by this minute discharge. Therefore, it becomes necessary to increase the insulation distance between the high voltage insulating container 6 and the multistage acceleration tube 11. This allows p high voltage insulating container 6
There was a problem in that it became large.
本発明の目的は、荷電粒子を発生および印加する荷電粒
子加速装置において、荷電粒子加速管の電極と対向する
高電圧絶縁容器に高電圧を分割抵抗により印加した電極
を設ける事により、高電圧絶縁容器内面と荷電粒子加速
管との微少放電を防止することによる安定な荷電粒子加
速装置を提供することＫある。An object of the present invention is to provide high voltage insulation in a charged particle accelerator that generates and applies charged particles by providing an electrode to which a high voltage is applied through a divided resistor in a high voltage insulation container facing the electrode of a charged particle acceleration tube. It is an object of the present invention to provide a stable charged particle accelerator by preventing minute discharge between the inner surface of a container and a charged particle accelerator tube.
高電圧絶縁容器と荷電粒子加速管との間で起こる微少放
電を防止する手段として、同電圧絶縁容器に加速管電極
と対向する位置に、加速管電極と同電圧にするために分
？ｒｌｌ砥抗で接続した電極を設けこれらを一体化した
。As a means to prevent micro-discharge occurring between the high-voltage insulating container and the charged particle accelerator tube, a high-voltage insulating container is placed at a position facing the accelerator tube electrode, so that the voltage is the same as that of the accelerating tube electrode. These were integrated by providing electrodes connected by rll grinding resistors.
以下、本発明の一実施例を第１図により説明する。 An embodiment of the present invention will be described below with reference to FIG.
高電圧は、抵抗ケーブルｌ、スプリング３を介して複数
段の加速電極１０に電圧分割用抵抗９により均等分割し
て印加する。The high voltage is equally divided and applied by a voltage dividing resistor 9 to multiple stages of accelerating electrodes 10 via a resistance cable 1 and a spring 3.
加速電ａｉｔｏを保持する複数段絶縁容器である多段加
速管ｌｌ内は高真空に保持されている。The interior of the multi-stage acceleration tube 11, which is a multi-stage insulated container that holds the accelerating electrons, is maintained at a high vacuum.
電子線は、フィラメント４を加熱し発生する。The electron beam is generated by heating the filament 4.
前記加熱電力は高周波結合したトランス５によシ伝送す
る。The heating power is transmitted through a high frequency coupled transformer 5.
多段加速管１１の上部電極７には、抵抗ケーブルＩｈよ
びブッシング２を界して高電圧が印加される。A high voltage is applied to the upper electrode 7 of the multistage acceleration tube 11 through the resistance cable Ih and the bushing 2.
多段加速管１１と高電圧絶縁容器６の間は、高絶縁ガス
である７レオン１２、ＳＦｇ等で満たされている。The space between the multistage accelerating tube 11 and the high voltage insulating container 6 is filled with highly insulating gas such as 7 Leon 12 and SFg.
多段加速管１１の外側には、シールド電極８が加速電極
１０とそれぞれ同電位になる。シールド電極８と対向す
る高電圧絶縁容器６の内面に電極１２を設け、前記のリ
ング電極１２は多段加速管１１外側の対向するシールド
電極８と同電位とするため分割抵抗１３を入れた。分割
抵抗１３およびリング電極１２は、高電圧絶縁容器６内
に設置、：する。On the outside of the multistage accelerating tube 11, the shield electrodes 8 and the accelerating electrodes 10 have the same potential. An electrode 12 was provided on the inner surface of the high voltage insulating container 6 facing the shield electrode 8, and a dividing resistor 13 was inserted in the ring electrode 12 so as to have the same potential as the shield electrode 8 facing outside the multistage acceleration tube 11. The divided resistor 13 and the ring electrode 12 are installed inside the high voltage insulating container 6.
°また分割抵抗１３を高電圧絶縁容器６と一体化せず高
電圧絶縁容器６の内側にリング電極Ｌ２と接続して設置
することも可能である。Further, it is also possible to install the divided resistor 13 not integrally with the high voltage insulating container 6 but connected to the ring electrode L2 inside the high voltage insulating container 6.
また第３図に示すように分割抵抗１３の代わシに電圧分
割用抵抗９を使用する。シールド電極８と対向するリン
グ電極１２をそれぞれ導電部材１４で接続することも可
能である。Further, as shown in FIG. 3, a voltage dividing resistor 9 is used in place of the dividing resistor 13. It is also possible to connect the ring electrode 12 facing the shield electrode 8 with a conductive member 14, respectively.
本発明によれば、多段加速管）１のシールド電極８と対
向する高電圧絶縁容器６の内面に前記シールド電極８と
同電位のリング電極１２を設けているので高電圧絶縁容
器６の内面の電位がリング電極Ｉ２によシ亀圧分割抵抗
９の数で強制的に分割され決まるので、電極８と対向す
る高電圧絶縁容器６の内面の電位分布も電極７とアース
間で等分割される。これによシ高電圧絶縁容器６の内面
の電位分布の片寄シがなく安定な高電圧が得られる。According to the present invention, since the ring electrode 12 having the same potential as the shield electrode 8 is provided on the inner surface of the high voltage insulating container 6 facing the shield electrode 8 of the multistage accelerator tube 1, the inner surface of the high voltage insulating container 6 Since the potential is forcibly divided and determined by the number of voltage dividing resistors 9 by the ring electrode I2, the potential distribution on the inner surface of the high voltage insulating container 6 facing the electrode 8 is also equally divided between the electrode 7 and the ground. . As a result, a stable high voltage can be obtained without biasing the potential distribution on the inner surface of the high voltage insulating container 6.
また分割抵抗１３を高電圧基準抵抗として兼用すること
によシ出願依頼受付番号０１１８４０８７８０に記載さ
れた効果も同時に得られる。Furthermore, by using the dividing resistor 13 also as a high voltage reference resistor, the effect described in application request reception number 0118408780 can be obtained at the same time.
したがって汎用の多段加速管を有する電子顕微鏡の性能
向上が計られ本発明の効果は大である。Therefore, the performance of an electron microscope having a general-purpose multi-stage accelerator tube is improved, and the effects of the present invention are significant.
〔発明の効果〕
本発明によれば、多段加速管と高電圧絶縁容器との電位
差の最大値は印加電圧をＶ（Ｖｌとし分割数をＮとすれ
ばＶｌＮ （Ｖ 〕となシ非常に小さくなる。[Effects of the Invention] According to the present invention, the maximum value of the potential difference between the multistage accelerator tube and the high voltage insulating container is very small, which is VlN (V ) where the applied voltage is V (Vl and the number of divisions is N). Become.
このため多段加速管と高電圧絶縁容器との間の絶縁距離
が小さくて良いので高電圧絶縁容器が小形になる。また
高電圧絶縁容器内面の電位分布が分割抵抗と電極によシ
強制的に決まるので電位分布が安定するまでの時間が短
かい等の効果がある。Therefore, the insulation distance between the multistage accelerator tube and the high-voltage insulating container can be small, so that the high-voltage insulating container can be made smaller. Furthermore, since the potential distribution on the inner surface of the high-voltage insulating container is forcibly determined by the dividing resistors and electrodes, there are effects such as a short time required for the potential distribution to stabilize.
第１図は本発明の荷電粒子加速装置の構成図、第２図は
従来の電子顕微鏡の加速装置の構成図、第３図は本発明
の他の実施列を示す図である。
１・・・抵抗ケーブル、２・・・ブッシング、３・・・
スプリング、４・・・フィラメント、５・・・トランス
、６・・・高電圧絶縁容器、７・・・上部電極、８・・
・シールド電極、９・・・電圧分割用抵抗、１０・・・
加速電極、１１・・・多段加速管、１２・・・リング電
極、１３・・・分割抵抗、１４・・・導電部材。FIG. 1 is a block diagram of a charged particle accelerator according to the present invention, FIG. 2 is a block diagram of a conventional electron microscope accelerator, and FIG. 3 is a diagram showing another embodiment of the present invention. 1... Resistance cable, 2... Bushing, 3...
Spring, 4... Filament, 5... Transformer, 6... High voltage insulation container, 7... Upper electrode, 8...
・Shield electrode, 9... Resistor for voltage division, 10...
Accelerating electrode, 11... Multistage accelerating tube, 12... Ring electrode, 13... Dividing resistor, 14... Conductive member.
Claims (1)
粒子加速装置において、加速管部電極と対向する電気絶
縁材からなる高電圧絶縁容器内面全周にリング状導電部
材およびリング状導電部材を接続する分割抵抗を前記高
電圧絶縁容器と一体化して設けた事を特徴とする荷電粒
子加速装置。 ２、特許請求の範囲第１項において、分割抵抗を高電圧
基準抵抗と兼用することを特徴とする荷電粒子加速装置
。 ３、特許請求の範囲第１項において、分割抵抗を高電圧
絶縁容器の外部に設けたことを特徴とする荷電粒子加速
装置。[Scope of Claims] 1. In a multi-stage charged particle accelerator having means for generating and accelerating charged particles, a ring-shaped conductive member is provided around the entire inner surface of a high voltage insulating container made of an electrically insulating material facing the acceleration tube electrode. and a charged particle accelerator characterized in that a dividing resistor for connecting the ring-shaped conductive member is provided integrally with the high voltage insulating container. 2. A charged particle accelerator according to claim 1, characterized in that the dividing resistor also serves as a high voltage reference resistor. 3. A charged particle accelerator according to claim 1, characterized in that a dividing resistor is provided outside the high voltage insulating container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4114485A JPS61200699A (en) | 1985-03-04 | 1985-03-04 | Charged particle accelerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4114485A JPS61200699A (en) | 1985-03-04 | 1985-03-04 | Charged particle accelerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61200699A true JPS61200699A (en) | 1986-09-05 |
Family
ID=12600221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4114485A Pending JPS61200699A (en) | 1985-03-04 | 1985-03-04 | Charged particle accelerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61200699A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03124500U (en) * | 1990-03-29 | 1991-12-17 | ||
| JPH04141998A (en) * | 1990-09-29 | 1992-05-15 | Shimadzu Corp | Acceleration tube |
| JP2008269915A (en) * | 2007-04-19 | 2008-11-06 | Futex Co Ltd | High-voltage power supply, and discharge resistance obtaining method thereof |
| JP2014053202A (en) * | 2012-09-07 | 2014-03-20 | Japan Atomic Energy Agency | High potential gradient type single-gap acceleration tube |
-
1985
- 1985-03-04 JP JP4114485A patent/JPS61200699A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03124500U (en) * | 1990-03-29 | 1991-12-17 | ||
| JPH04141998A (en) * | 1990-09-29 | 1992-05-15 | Shimadzu Corp | Acceleration tube |
| JP2008269915A (en) * | 2007-04-19 | 2008-11-06 | Futex Co Ltd | High-voltage power supply, and discharge resistance obtaining method thereof |
| JP2014053202A (en) * | 2012-09-07 | 2014-03-20 | Japan Atomic Energy Agency | High potential gradient type single-gap acceleration tube |
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