JPS61200179U - - Google Patents

Info

Publication number
JPS61200179U
JPS61200179U JP8297185U JP8297185U JPS61200179U JP S61200179 U JPS61200179 U JP S61200179U JP 8297185 U JP8297185 U JP 8297185U JP 8297185 U JP8297185 U JP 8297185U JP S61200179 U JPS61200179 U JP S61200179U
Authority
JP
Japan
Prior art keywords
cup
coating device
resist
resist coating
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8297185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8297185U priority Critical patent/JPS61200179U/ja
Publication of JPS61200179U publication Critical patent/JPS61200179U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP8297185U 1985-05-30 1985-05-30 Pending JPS61200179U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8297185U JPS61200179U (enrdf_load_stackoverflow) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8297185U JPS61200179U (enrdf_load_stackoverflow) 1985-05-30 1985-05-30

Publications (1)

Publication Number Publication Date
JPS61200179U true JPS61200179U (enrdf_load_stackoverflow) 1986-12-15

Family

ID=30631178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8297185U Pending JPS61200179U (enrdf_load_stackoverflow) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPS61200179U (enrdf_load_stackoverflow)

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