JPS61199039U - - Google Patents

Info

Publication number
JPS61199039U
JPS61199039U JP8323485U JP8323485U JPS61199039U JP S61199039 U JPS61199039 U JP S61199039U JP 8323485 U JP8323485 U JP 8323485U JP 8323485 U JP8323485 U JP 8323485U JP S61199039 U JPS61199039 U JP S61199039U
Authority
JP
Japan
Prior art keywords
dry etching
etching apparatus
plasma dry
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8323485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8323485U priority Critical patent/JPS61199039U/ja
Publication of JPS61199039U publication Critical patent/JPS61199039U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP8323485U 1985-05-31 1985-05-31 Pending JPS61199039U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8323485U JPS61199039U (US06521211-20030218-C00004.png) 1985-05-31 1985-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8323485U JPS61199039U (US06521211-20030218-C00004.png) 1985-05-31 1985-05-31

Publications (1)

Publication Number Publication Date
JPS61199039U true JPS61199039U (US06521211-20030218-C00004.png) 1986-12-12

Family

ID=30631675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8323485U Pending JPS61199039U (US06521211-20030218-C00004.png) 1985-05-31 1985-05-31

Country Status (1)

Country Link
JP (1) JPS61199039U (US06521211-20030218-C00004.png)

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