JPS61198952U - - Google Patents
Info
- Publication number
- JPS61198952U JPS61198952U JP1985081410U JP8141085U JPS61198952U JP S61198952 U JPS61198952 U JP S61198952U JP 1985081410 U JP1985081410 U JP 1985081410U JP 8141085 U JP8141085 U JP 8141085U JP S61198952 U JPS61198952 U JP S61198952U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- mask
- attached
- pellicle frame
- magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985081410U JPS61198952U (fr) | 1985-05-30 | 1985-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985081410U JPS61198952U (fr) | 1985-05-30 | 1985-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61198952U true JPS61198952U (fr) | 1986-12-12 |
Family
ID=30628167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985081410U Pending JPS61198952U (fr) | 1985-05-30 | 1985-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61198952U (fr) |
-
1985
- 1985-05-30 JP JP1985081410U patent/JPS61198952U/ja active Pending