JPS61198265U - - Google Patents

Info

Publication number
JPS61198265U
JPS61198265U JP7962185U JP7962185U JPS61198265U JP S61198265 U JPS61198265 U JP S61198265U JP 7962185 U JP7962185 U JP 7962185U JP 7962185 U JP7962185 U JP 7962185U JP S61198265 U JPS61198265 U JP S61198265U
Authority
JP
Japan
Prior art keywords
nozzle
crucible
substrate
peripheral
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7962185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7962185U priority Critical patent/JPS61198265U/ja
Publication of JPS61198265U publication Critical patent/JPS61198265U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7962185U 1985-05-28 1985-05-28 Pending JPS61198265U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7962185U JPS61198265U (zh) 1985-05-28 1985-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7962185U JPS61198265U (zh) 1985-05-28 1985-05-28

Publications (1)

Publication Number Publication Date
JPS61198265U true JPS61198265U (zh) 1986-12-11

Family

ID=30624706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7962185U Pending JPS61198265U (zh) 1985-05-28 1985-05-28

Country Status (1)

Country Link
JP (1) JPS61198265U (zh)

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