JPS61198265U - - Google Patents
Info
- Publication number
- JPS61198265U JPS61198265U JP7962185U JP7962185U JPS61198265U JP S61198265 U JPS61198265 U JP S61198265U JP 7962185 U JP7962185 U JP 7962185U JP 7962185 U JP7962185 U JP 7962185U JP S61198265 U JPS61198265 U JP S61198265U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- crucible
- substrate
- peripheral
- central
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7962185U JPS61198265U (et) | 1985-05-28 | 1985-05-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7962185U JPS61198265U (et) | 1985-05-28 | 1985-05-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61198265U true JPS61198265U (et) | 1986-12-11 |
Family
ID=30624706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7962185U Pending JPS61198265U (et) | 1985-05-28 | 1985-05-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61198265U (et) |
-
1985
- 1985-05-28 JP JP7962185U patent/JPS61198265U/ja active Pending