JPS61197500U - - Google Patents
Info
- Publication number
- JPS61197500U JPS61197500U JP7922385U JP7922385U JPS61197500U JP S61197500 U JPS61197500 U JP S61197500U JP 7922385 U JP7922385 U JP 7922385U JP 7922385 U JP7922385 U JP 7922385U JP S61197500 U JPS61197500 U JP S61197500U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- vacuum
- high vacuum
- pressure
- movable exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7922385U JPS61197500U (enExample) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7922385U JPS61197500U (enExample) | 1985-05-29 | 1985-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61197500U true JPS61197500U (enExample) | 1986-12-09 |
Family
ID=30623934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7922385U Pending JPS61197500U (enExample) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61197500U (enExample) |
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1985
- 1985-05-29 JP JP7922385U patent/JPS61197500U/ja active Pending