JPS61197500U - - Google Patents

Info

Publication number
JPS61197500U
JPS61197500U JP7922385U JP7922385U JPS61197500U JP S61197500 U JPS61197500 U JP S61197500U JP 7922385 U JP7922385 U JP 7922385U JP 7922385 U JP7922385 U JP 7922385U JP S61197500 U JPS61197500 U JP S61197500U
Authority
JP
Japan
Prior art keywords
exhaust
vacuum
high vacuum
pressure
movable exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7922385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7922385U priority Critical patent/JPS61197500U/ja
Publication of JPS61197500U publication Critical patent/JPS61197500U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Furnace Details (AREA)
  • Drying Of Semiconductors (AREA)
JP7922385U 1985-05-29 1985-05-29 Pending JPS61197500U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7922385U JPS61197500U (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7922385U JPS61197500U (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Publications (1)

Publication Number Publication Date
JPS61197500U true JPS61197500U (enrdf_load_stackoverflow) 1986-12-09

Family

ID=30623934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7922385U Pending JPS61197500U (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Country Status (1)

Country Link
JP (1) JPS61197500U (enrdf_load_stackoverflow)

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