JPS61197427U - - Google Patents

Info

Publication number
JPS61197427U
JPS61197427U JP7970885U JP7970885U JPS61197427U JP S61197427 U JPS61197427 U JP S61197427U JP 7970885 U JP7970885 U JP 7970885U JP 7970885 U JP7970885 U JP 7970885U JP S61197427 U JPS61197427 U JP S61197427U
Authority
JP
Japan
Prior art keywords
clean
area
room
air outlet
blowing out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7970885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512669Y2 (US07223432-20070529-C00017.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985079708U priority Critical patent/JPH0512669Y2/ja
Publication of JPS61197427U publication Critical patent/JPS61197427U/ja
Application granted granted Critical
Publication of JPH0512669Y2 publication Critical patent/JPH0512669Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1985079708U 1985-05-28 1985-05-28 Expired - Lifetime JPH0512669Y2 (US07223432-20070529-C00017.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985079708U JPH0512669Y2 (US07223432-20070529-C00017.png) 1985-05-28 1985-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985079708U JPH0512669Y2 (US07223432-20070529-C00017.png) 1985-05-28 1985-05-28

Publications (2)

Publication Number Publication Date
JPS61197427U true JPS61197427U (US07223432-20070529-C00017.png) 1986-12-09
JPH0512669Y2 JPH0512669Y2 (US07223432-20070529-C00017.png) 1993-04-02

Family

ID=30624869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985079708U Expired - Lifetime JPH0512669Y2 (US07223432-20070529-C00017.png) 1985-05-28 1985-05-28

Country Status (1)

Country Link
JP (1) JPH0512669Y2 (US07223432-20070529-C00017.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195636A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100483U (US07223432-20070529-C00017.png) * 1980-12-08 1982-06-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100483U (US07223432-20070529-C00017.png) * 1980-12-08 1982-06-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195636A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル

Also Published As

Publication number Publication date
JPH0512669Y2 (US07223432-20070529-C00017.png) 1993-04-02

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