JPS61197305U - - Google Patents

Info

Publication number
JPS61197305U
JPS61197305U JP8138785U JP8138785U JPS61197305U JP S61197305 U JPS61197305 U JP S61197305U JP 8138785 U JP8138785 U JP 8138785U JP 8138785 U JP8138785 U JP 8138785U JP S61197305 U JPS61197305 U JP S61197305U
Authority
JP
Japan
Prior art keywords
diaphragm
rod member
plate material
diaphragm actuator
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8138785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332805Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8138785U priority Critical patent/JPH0332805Y2/ja
Publication of JPS61197305U publication Critical patent/JPS61197305U/ja
Application granted granted Critical
Publication of JPH0332805Y2 publication Critical patent/JPH0332805Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP8138785U 1985-05-30 1985-05-30 Expired JPH0332805Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8138785U JPH0332805Y2 (de) 1985-05-30 1985-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8138785U JPH0332805Y2 (de) 1985-05-30 1985-05-30

Publications (2)

Publication Number Publication Date
JPS61197305U true JPS61197305U (de) 1986-12-09
JPH0332805Y2 JPH0332805Y2 (de) 1991-07-11

Family

ID=30628128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8138785U Expired JPH0332805Y2 (de) 1985-05-30 1985-05-30

Country Status (1)

Country Link
JP (1) JPH0332805Y2 (de)

Also Published As

Publication number Publication date
JPH0332805Y2 (de) 1991-07-11

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