JPS61196527U - - Google Patents
Info
- Publication number
- JPS61196527U JPS61196527U JP7922185U JP7922185U JPS61196527U JP S61196527 U JPS61196527 U JP S61196527U JP 7922185 U JP7922185 U JP 7922185U JP 7922185 U JP7922185 U JP 7922185U JP S61196527 U JPS61196527 U JP S61196527U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- drive circuit
- drive
- circuit
- limit sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 5
Description
第１図は本考案による位置決め装置の一実施例
であるレチクル徴動台の構成図、第２図はステー
ジの可動範囲とリミツトセンサ及びリミツトスイ
ツチ配置図、第３図は、位置検出器の出力特性、
第４図は、本考案の一実施例であるレチクル徴動
台制御部のブロツク図、第５図は、本考案のリレ
ー回路およびリミツトスイツチの一例を示す回路
ブロツク図である。
１…位置決め装置（レチクル徴動台）、１１…
ＸＹステージ、１２…Ｑステージ、２１…Ｘ軸パ
ルスモータ、２２…Ｙ軸パルスモータ、２３…Ｑ
軸パルスモータ、３１〜３３…送りネジ、４１〜
４３…減速機構、５１〜５３…位置検出器、６１
〜６６…リミツトセンサ、７１〜７６…リミツト
スイツチ、９１…ＣＰＵ回路、９２…インターフ
エース回路、９３…Ａ／Ｄコンバータ、９４…マ
ルチプレクサ、９５…制御回路（パルスモータコ
ントローラ）、９６〜９８…駆動回路（パルスモ
ータドライバ）、９９…駆動回路電源、８…リレ
ー回路、８１…リレー電源、８２…リレーコイル
、Ｓ１〜Ｓ４…リレー接点、ｌ１…ステージの通
常移動範囲、ｌ４…ステージの最大可動範囲。
Fig. 1 is a configuration diagram of a reticle command table which is an embodiment of the positioning device according to the present invention, Fig. 2 is a diagram showing the movable range of the stage and the arrangement of limit sensors and limit switches, and Fig. 3 is a diagram showing the output characteristics of the position detector.
FIG. 4 is a block diagram of a reticle command table control section according to an embodiment of the present invention, and FIG. 5 is a circuit block diagram showing an example of a relay circuit and a limit switch of the present invention. 1...Positioning device (reticle command base), 11...
XY stage, 12...Q stage, 21...X-axis pulse motor, 22...Y-axis pulse motor, 23...Q
Axis pulse motor, 31-33...Feed screw, 41-
43... Reduction mechanism, 51-53... Position detector, 61
~66...Limit sensor, 71-76...Limit switch, 91...CPU circuit, 92...Interface circuit, 93...A/D converter, 94...Multiplexer, 95...Control circuit (pulse motor controller), 96-98...Drive circuit ( pulse motor driver), 99...Drive circuit power supply, 8...Relay circuit, 81...Relay power supply, 82...Relay coil, S1 to S4...Relay contact, l1 ...Normal movement range of stage, l4 ...Maximum movement range of stage .
Claims (1)
するステージ駆動部と、このステージ駆動部を駆
動する駆動回路と、この駆動回路を制御する制御
回路と、前記ステージの可動範囲内に配置されて
動作時に、前記制御回路にステージ停止命令を出
力するリミツトセンサとを具備する位置決め装置
において、前記リミツトセンサの動作点の外側に
配置されて動作時に前記駆動回路への駆動命令回
線を遮断した後に前記駆動回路への電源を遮断す
る手断となるリミツトスイツチを設けたことを特
徴とする位置決め装置。 A stage with one or more axes, a stage drive unit that drives each stage, a drive circuit that drives this stage drive unit, a control circuit that controls this drive circuit, and is arranged and operated within a movable range of the stage. In some cases, in a positioning device equipped with a limit sensor that outputs a stage stop command to the control circuit, the limit sensor is placed outside the operating point of the limit sensor, and the drive command line to the drive circuit is cut off during operation, and then the stage stop command is sent to the drive circuit. A positioning device characterized by being equipped with a limit switch that manually cuts off the power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7922185U JPS61196527U (en) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7922185U JPS61196527U (en) | 1985-05-29 | 1985-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61196527U true JPS61196527U (en) | 1986-12-08 |
Family
ID=30623930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7922185U Pending JPS61196527U (en) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61196527U (en) |
-
1985
- 1985-05-29 JP JP7922185U patent/JPS61196527U/ja active Pending
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