JPS61195044U - - Google Patents

Info

Publication number

JPS61195044U

JPS61195044U JP7902385U JP7902385U JPS61195044U JP S61195044 U JPS61195044 U JP S61195044U JP 7902385 U JP7902385 U JP 7902385U JP 7902385 U JP7902385 U JP 7902385U JP S61195044 U JPS61195044 U JP S61195044U

Authority

JP

Japan

Prior art keywords

heater

core tube

furnace core

view

heated

Prior art date

1985-05-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 235000012431 wafers Nutrition 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 2
• 238000009792 diffusion process Methods 0.000 description 1
• 238000010438 heat treatment Methods 0.000 description 1
• 239000012535 impurity Substances 0.000 description 1

Cited By (1)