JPS61195043U - - Google Patents
Info
- Publication number
- JPS61195043U JPS61195043U JP7810885U JP7810885U JPS61195043U JP S61195043 U JPS61195043 U JP S61195043U JP 7810885 U JP7810885 U JP 7810885U JP 7810885 U JP7810885 U JP 7810885U JP S61195043 U JPS61195043 U JP S61195043U
- Authority
- JP
- Japan
- Prior art keywords
- line
- valves
- growth furnace
- vent line
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7810885U JPH0526736Y2 ( ) | 1985-05-24 | 1985-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7810885U JPH0526736Y2 ( ) | 1985-05-24 | 1985-05-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61195043U true JPS61195043U ( ) | 1986-12-04 |
| JPH0526736Y2 JPH0526736Y2 ( ) | 1993-07-07 |
Family
ID=30621789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7810885U Expired - Lifetime JPH0526736Y2 ( ) | 1985-05-24 | 1985-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526736Y2 ( ) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006203208A (ja) * | 2005-01-19 | 2006-08-03 | Samsung Electronics Co Ltd | ４方弁を有する半導体素子の製造装置、半導体素子の製造装置の弁制御方法及びそれを用いた半導体素子の製造方法 |
| US11559599B2 (en) | 2017-09-15 | 2023-01-24 | Sony Corporation | Scent retaining structure, method of manufacturing the scent retaining structure, and scent providing device |
-
1985
- 1985-05-24 JP JP7810885U patent/JPH0526736Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006203208A (ja) * | 2005-01-19 | 2006-08-03 | Samsung Electronics Co Ltd | ４方弁を有する半導体素子の製造装置、半導体素子の製造装置の弁制御方法及びそれを用いた半導体素子の製造方法 |
| US11559599B2 (en) | 2017-09-15 | 2023-01-24 | Sony Corporation | Scent retaining structure, method of manufacturing the scent retaining structure, and scent providing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526736Y2 ( ) | 1993-07-07 |