JPS61194949U - - Google Patents

Info

Publication number
JPS61194949U
JPS61194949U JP7922285U JP7922285U JPS61194949U JP S61194949 U JPS61194949 U JP S61194949U JP 7922285 U JP7922285 U JP 7922285U JP 7922285 U JP7922285 U JP 7922285U JP S61194949 U JPS61194949 U JP S61194949U
Authority
JP
Japan
Prior art keywords
heats
raw material
introduction pipe
ionization chamber
vaporization device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7922285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7922285U priority Critical patent/JPS61194949U/ja
Publication of JPS61194949U publication Critical patent/JPS61194949U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP7922285U 1985-05-29 1985-05-29 Pending JPS61194949U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7922285U JPS61194949U (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7922285U JPS61194949U (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Publications (1)

Publication Number Publication Date
JPS61194949U true JPS61194949U (enrdf_load_stackoverflow) 1986-12-04

Family

ID=30623932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7922285U Pending JPS61194949U (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Country Status (1)

Country Link
JP (1) JPS61194949U (enrdf_load_stackoverflow)

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