JPS61194250U - - Google Patents
Info
- Publication number
- JPS61194250U JPS61194250U JP7719485U JP7719485U JPS61194250U JP S61194250 U JPS61194250 U JP S61194250U JP 7719485 U JP7719485 U JP 7719485U JP 7719485 U JP7719485 U JP 7719485U JP S61194250 U JPS61194250 U JP S61194250U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- circular disk
- cylindrical
- wafer support
- clamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7719485U JPS61194250U (enExample) | 1985-05-24 | 1985-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7719485U JPS61194250U (enExample) | 1985-05-24 | 1985-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61194250U true JPS61194250U (enExample) | 1986-12-03 |
Family
ID=30620040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7719485U Pending JPS61194250U (enExample) | 1985-05-24 | 1985-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194250U (enExample) |
-
1985
- 1985-05-24 JP JP7719485U patent/JPS61194250U/ja active Pending