JPS61194250U - - Google Patents

Info

Publication number
JPS61194250U
JPS61194250U JP7719485U JP7719485U JPS61194250U JP S61194250 U JPS61194250 U JP S61194250U JP 7719485 U JP7719485 U JP 7719485U JP 7719485 U JP7719485 U JP 7719485U JP S61194250 U JPS61194250 U JP S61194250U
Authority
JP
Japan
Prior art keywords
wafer
circular disk
cylindrical
wafer support
clamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7719485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7719485U priority Critical patent/JPS61194250U/ja
Publication of JPS61194250U publication Critical patent/JPS61194250U/ja
Pending legal-status Critical Current

Links

JP7719485U 1985-05-24 1985-05-24 Pending JPS61194250U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7719485U JPS61194250U (enrdf_load_stackoverflow) 1985-05-24 1985-05-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7719485U JPS61194250U (enrdf_load_stackoverflow) 1985-05-24 1985-05-24

Publications (1)

Publication Number Publication Date
JPS61194250U true JPS61194250U (enrdf_load_stackoverflow) 1986-12-03

Family

ID=30620040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7719485U Pending JPS61194250U (enrdf_load_stackoverflow) 1985-05-24 1985-05-24

Country Status (1)

Country Link
JP (1) JPS61194250U (enrdf_load_stackoverflow)

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