JPS61194126U - - Google Patents

Info

Publication number

JPS61194126U

JPS61194126U JP7730985U JP7730985U JPS61194126U JP S61194126 U JPS61194126 U JP S61194126U JP 7730985 U JP7730985 U JP 7730985U JP 7730985 U JP7730985 U JP 7730985U JP S61194126 U JPS61194126 U JP S61194126U

Authority

JP

Japan

Prior art keywords

output

ventilation unit

level

detection section

contamination detection

Prior art date

1985-05-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009423 ventilation Methods 0.000 claims description 7
• 238000011109 contamination Methods 0.000 claims description 6
• 238000001514 detection method Methods 0.000 claims description 5
• 238000010586 diagram Methods 0.000 description 3

Cited By (1)