JPS61193455U - - Google Patents

Info

Publication number
JPS61193455U
JPS61193455U JP1985077843U JP7784385U JPS61193455U JP S61193455 U JPS61193455 U JP S61193455U JP 1985077843 U JP1985077843 U JP 1985077843U JP 7784385 U JP7784385 U JP 7784385U JP S61193455 U JPS61193455 U JP S61193455U
Authority
JP
Japan
Prior art keywords
glass mask
cleaning
cleaning water
water nozzle
exhaust box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985077843U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985077843U priority Critical patent/JPS61193455U/ja
Publication of JPS61193455U publication Critical patent/JPS61193455U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1985077843U 1985-05-25 1985-05-25 Pending JPS61193455U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985077843U JPS61193455U (US07923587-20110412-C00022.png) 1985-05-25 1985-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985077843U JPS61193455U (US07923587-20110412-C00022.png) 1985-05-25 1985-05-25

Publications (1)

Publication Number Publication Date
JPS61193455U true JPS61193455U (US07923587-20110412-C00022.png) 1986-12-02

Family

ID=30621278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985077843U Pending JPS61193455U (US07923587-20110412-C00022.png) 1985-05-25 1985-05-25

Country Status (1)

Country Link
JP (1) JPS61193455U (US07923587-20110412-C00022.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005317922A (ja) * 2004-03-29 2005-11-10 Shibaura Mechatronics Corp 基板の処理装置及び処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005317922A (ja) * 2004-03-29 2005-11-10 Shibaura Mechatronics Corp 基板の処理装置及び処理方法
JP4495618B2 (ja) * 2004-03-29 2010-07-07 芝浦メカトロニクス株式会社 基板の処理装置及び処理方法

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