JPS61193454U - - Google Patents
Info
- Publication number
- JPS61193454U JPS61193454U JP1985076986U JP7698685U JPS61193454U JP S61193454 U JPS61193454 U JP S61193454U JP 1985076986 U JP1985076986 U JP 1985076986U JP 7698685 U JP7698685 U JP 7698685U JP S61193454 U JPS61193454 U JP S61193454U
- Authority
- JP
- Japan
- Prior art keywords
- view
- mask
- photomask substrate
- resist
- sectional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985076986U JPS61193454U (US20100268047A1-20101021-C00003.png) | 1985-05-22 | 1985-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985076986U JPS61193454U (US20100268047A1-20101021-C00003.png) | 1985-05-22 | 1985-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61193454U true JPS61193454U (US20100268047A1-20101021-C00003.png) | 1986-12-02 |
Family
ID=30619632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985076986U Pending JPS61193454U (US20100268047A1-20101021-C00003.png) | 1985-05-22 | 1985-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61193454U (US20100268047A1-20101021-C00003.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011209344A (ja) * | 2010-03-29 | 2011-10-20 | Shin-Etsu Chemical Co Ltd | ペリクル及びその取り付け方法、並びにペリクル付マスク及びマスク |
-
1985
- 1985-05-22 JP JP1985076986U patent/JPS61193454U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011209344A (ja) * | 2010-03-29 | 2011-10-20 | Shin-Etsu Chemical Co Ltd | ペリクル及びその取り付け方法、並びにペリクル付マスク及びマスク |
| US8582077B2 (en) | 2010-03-29 | 2013-11-12 | Shin-Etsu Chemical Co., Ltd. | Pellicle, mounting method therefor, pellicle-equipped mask, and mask |
