JPS61192460U - - Google Patents

Info

Publication number

JPS61192460U

JPS61192460U JP7584585U JP7584585U JPS61192460U JP S61192460 U JPS61192460 U JP S61192460U JP 7584585 U JP7584585 U JP 7584585U JP 7584585 U JP7584585 U JP 7584585U JP S61192460 U JPS61192460 U JP S61192460U

Authority

JP

Japan

Prior art keywords

covered

pressure sensor

piezoresistive element

silicon

semiconductor

Prior art date

1985-05-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 4
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
• 229910052710 silicon Inorganic materials 0.000 claims 2
• 239000010703 silicon Substances 0.000 claims 2
• 239000000758 substrate Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 5
• 239000012528 membrane Substances 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 238000002161 passivation Methods 0.000 description 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
• 229920005591 polysilicon Polymers 0.000 description 1

Cited By (1)