JPS61191332U - - Google Patents

Info

Publication number
JPS61191332U
JPS61191332U JP7660485U JP7660485U JPS61191332U JP S61191332 U JPS61191332 U JP S61191332U JP 7660485 U JP7660485 U JP 7660485U JP 7660485 U JP7660485 U JP 7660485U JP S61191332 U JPS61191332 U JP S61191332U
Authority
JP
Japan
Prior art keywords
slits
cassette
semiconductor wafers
slit
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7660485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7660485U priority Critical patent/JPS61191332U/ja
Publication of JPS61191332U publication Critical patent/JPS61191332U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Wrappers (AREA)
JP7660485U 1985-05-23 1985-05-23 Pending JPS61191332U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7660485U JPS61191332U (enrdf_load_stackoverflow) 1985-05-23 1985-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7660485U JPS61191332U (enrdf_load_stackoverflow) 1985-05-23 1985-05-23

Publications (1)

Publication Number Publication Date
JPS61191332U true JPS61191332U (enrdf_load_stackoverflow) 1986-11-28

Family

ID=30618897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7660485U Pending JPS61191332U (enrdf_load_stackoverflow) 1985-05-23 1985-05-23

Country Status (1)

Country Link
JP (1) JPS61191332U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04162745A (ja) * 1990-10-26 1992-06-08 Fujitsu Ltd ウエハの移し換え方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04162745A (ja) * 1990-10-26 1992-06-08 Fujitsu Ltd ウエハの移し換え方法

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