JPS61191332U - - Google Patents
Info
- Publication number
- JPS61191332U JPS61191332U JP7660485U JP7660485U JPS61191332U JP S61191332 U JPS61191332 U JP S61191332U JP 7660485 U JP7660485 U JP 7660485U JP 7660485 U JP7660485 U JP 7660485U JP S61191332 U JPS61191332 U JP S61191332U
- Authority
- JP
- Japan
- Prior art keywords
- slits
- cassette
- semiconductor wafers
- slit
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 5
Landscapes
- Wrappers (AREA)
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7660485U JPS61191332U (cs) | 1985-05-23 | 1985-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7660485U JPS61191332U (cs) | 1985-05-23 | 1985-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61191332U true JPS61191332U (cs) | 1986-11-28 |
Family
ID=30618897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7660485U Pending JPS61191332U (cs) | 1985-05-23 | 1985-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61191332U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04162745A (ja) * | 1990-10-26 | 1992-06-08 | Fujitsu Ltd | ウエハの移し換え方法 |
-
1985
- 1985-05-23 JP JP7660485U patent/JPS61191332U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04162745A (ja) * | 1990-10-26 | 1992-06-08 | Fujitsu Ltd | ウエハの移し換え方法 |