JPS6119092B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of a superconducting magnet device that generates a highly uniform or highly accurate magnetic field distribution.

Conventionally, the structures of superconducting magnet devices used in electron lenses, electron beam transfer devices, etc. that create a predetermined magnetic field distribution through the interaction of magnetic fields generated from two or more superconducting magnets are shown in Figures 1 and 2. The situation was as shown in . That is, two superconducting magnets 1,
2 are housed in separate cold containers 4 and 5 containing liquid helium 3, and a passage 6 is provided to connect the respective cold containers 4 and 5.
A refrigerant 3 flows through this passage 6, and an electric wiring 7 connecting the superconducting magnets 1 and 2 is provided. On the other hand, the cold storage containers 4, 5 consist of outer tanks 8, 9 and inner tanks 10, 11 containing the refrigerant 3, and radiation shield plates 12, 13 are provided between the inner tanks 10, 11 and the outer tanks 8, 9. The shield plates 12 and 13 are provided with shield tubes 14 and 15 through which a refrigerant flows to enhance the shielding effect. The electromagnetic force acting on the superconducting magnet 1 is applied to the support rods 16, 17, 18, and the superconducting magnet 2
The electromagnetic force acting on the support rods 19, 20, and 21 is supported by support rods 19, 20, and 21, respectively. Furthermore, a support device 22 is attached to hold the cold containers 1 and 2. FIG. 2 shows a perspective view of the superconducting magnet device described above.

In the superconducting magnet device configured as described above, the relative positions of the superconducting magnets 1 and 2 and the cold containers 4 and 5 are fixed. Therefore, when generating a highly uniform or highly accurate magnetic field distribution, that is, when operating the cold storage containers 4, 5 by cooling them from room temperature to the refrigerant temperature, the electromagnets 1, 2 and the support rods 16, 1
Even if the relative positions of electromagnets 1 and 2 deviate from the set positions due to heat shrinkage of 7, 18, 19, 20, and 21, and the electromagnetic force between electromagnets 1 and 2, the relative positions cannot be adjusted, resulting in high uniformity. , it was not possible to generate a highly accurate magnetic field.

An object of the present invention was to provide a superconducting magnet device capable of generating highly uniform or highly accurate magnetic field distribution by having a structure in which the relative positions between superconducting magnets are movable. It is about providing.

The present invention provides a superconducting magnet device in which a plurality of superconducting magnets are supported by a support device and accommodated in a plurality of cold containers, and a movable device that supports and moves these cold containers is provided in the cold container, A structure is provided between the plurality of cold insulating containers, in which a path is provided between the plurality of cold insulating containers, through which the refrigerant in the plurality of cold insulating containers flows, the wiring between the superconducting magnets is housed, and a bellows moves in conjunction with the movable device. This allows the relative positions between the magnets to be adjusted.

Hereinafter, typical embodiments of the present invention will be described with reference to the drawings.

FIG. 3 shows a schematic cross section of a superconducting device according to the present invention, and the same parts as in FIG. 1 are denoted by the same reference numerals and have the same structure. The passage 6 connecting the cold containers 4 and 5 has the same structure as the cold containers 4 and 5, and has a double insulation structure, and includes an outer tank 30, an inner tank 31, and a radiation shield plate 32. A shield tube 33 is provided to flow a refrigerant such as helium gas or liquid nitrogen to enhance the shielding effect. The outer tank 30 and the inner tank 31 of the passage 6 are each made of a bellows, and the radiation shield plate 32 is provided with a sliding portion 32A so as to be slidable. The cold containers 4 and 5 are supported by a movable device 34. The movable device 34 has a screw 35 at one end,
36, a support member 37 for supporting the cold container 4, and a sliding mechanism 39 having a nut 38, and the other end is constituted by a holding member 40 for supporting the cold container 5.

FIG. 4 shows a partial perspective view of the sliding mechanism 39 of the movable device 34. FIG. 5 shows a partial sectional view of the sliding mechanism 39. A screw 36 is attached to a support member 37 that supports the cold container 4 and passes through the holding member 40, and by sliding the screw 36, the cold container 4 can be moved in the horizontal direction. Further, the screw 35 is attached vertically from the upper end of the holding member 40, and by sliding the nut 38, the cold storage container 4 can be moved in the vertical direction.

Next, the support device 4 that supports the superconducting magnets 1 and 2
1, 42...46, the support device 44, 4
Support rods 5 and 46 fix the superconducting magnet 2, and support devices 41, 42, and 43 allow the position of the superconducting magnet 1 to be movable within the cold storage container 4. The support devices 41, 42, 43 include support rods 47, 48, 49 that support the superconducting magnet 1, and support rods 47, 48, 4.
Bellows members 50, 51, 52 provided in the inner tank 10 to allow the bellows 9 to move through the inner tank 10 and the outer tank 8, and bellows members 53, 54, 55 provided in the outer tank 8. and bellows member 5
Covers 56, 57, 58 that cover 3, 54, 55
and screws 59, 60, 61 and nuts 62, 6 provided on the covers 56, 57, 58 as moving means for moving the support rods 47, 48, 49.
3 and 64, respectively.

Further, the superconducting magnets 1 and 2 housed in the cold storage containers 4 and 5, respectively, are connected by a wire 7 having at least a portion formed in the shape of an expandable and contractable spring.

Next, the operation of the superconducting magnet device will be explained.
In order to operate this device, the refrigerant 3 is supplied to the cold containers 4 and 5, and then the superconducting magnets 1 and 2 are excited.
The relative positions of the support rods 44, 45, 46, 47, 48,
Misalignment occurs due to heat shrinkage such as 49. Therefore, when the screws 35 and 36 of the sliding mechanism 39 of the movable device 34 are slid, the outer tank 3 of the passage 6 between the cold containers 4 and 5 is moved.
0, since the bellows of the inner tank 31, the sliding portion 32A of the radiation shield plate 32, and the wiring 7 move in the same direction as the sliding direction, the cold container 4 is moved into the cold container 5.
It can be moved horizontally or vertically. The relative positions of superconducting magnets 1 and 2 can be adjusted. Further, supporting devices 41 and 4 supporting the superconducting magnet 1 housed in the cold container 4
The bolts 59, 60, 61 move by sliding the nuts 62, 63, 64 of No. 2, 43. A bellows member 5 provided in the outer tank 8 of the cold container 4
3, 54, 55 move support rods 47, 48, 49 in conjunction with bolts 59, 60, 61. Support rods 47 , 48 , 49 move superconducting magnet 1 via bellows members 50 , 51 , 52 provided in inner tank 10 . Thereby, the relative position of the superconducting magnet 1 with respect to the superconducting magnet 2 can be adjusted.

In the above explanation, the sliding mechanism 39 in the movable device 34 for moving the cold storage containers 4, 5 is constructed using the nut 38 and the screws 35, 36, but it may also be constructed using a motor or the like. Similarly, superconducting magnet 1
The supporting devices 41, 42, 43 that support the screws 5
It is also possible to use not only the nuts 9, 60, 61 and the nuts 62, 63, 64, but also a motor or the like. Further, although only the superconducting magnet 1 is made movable, the supporting devices 44, 45, and 46 may be configured so that the superconducting magnet 2 is also movable.

In addition, both superconducting magnets 1 and 2 are fixed with a support device,
It can be something that doesn't move.

As is clear from the above explanation, by using the superconducting magnet device according to the present invention, the relative positions between the superconducting magnets can be adjusted, so that the relative positional deviation between the superconducting magnets due to thermal contraction and electromagnetic force can be corrected. It has excellent effects such as being able to generate a highly uniform and highly accurate magnetic field distribution.

[Brief explanation of the drawing]

FIG. 1 is a sectional view schematically showing a conventional superconducting magnet device, FIG. 2 is a perspective view thereof, FIG. 3 is a sectional view schematically showing a superconducting magnet device according to the present invention, and FIG. 4 is a holding device. FIG. 5 shows a partial sectional view of the holding device. 1, 2...Superconducting magnet, 3...Refrigerant, 4, 5...
...Cold container, 6...Aisle, 7...Wiring, 30,3
1... Bellows, 32... Radiation shield plate, 32
A...Sliding portion, 34...Movable device, 41, 4
2, 43, 44, 45, 46...support device, 4
7, 48, 49...Support rod, 50, 51, 52,
53, 54, 55... bellows member, 59, 6
0,61...Natsuto (transportation means), 62,63,
64...Bolt (movement means).

Claims (1)

[Scope of Claims] 1. A plurality of superconducting magnets, a plurality of cold containers containing a refrigerant and accommodating the superconducting magnets, and a plurality of supporting devices that respectively support the superconducting magnets in the cold containers; A refrigerant flows between a movable device provided in the plurality of cold insulating containers that supports and makes the cold insulating containers movable, and wiring between the superconducting magnets is housed, 1. A superconducting magnet device characterized by comprising a passage composed of a bellows that moves in conjunction with a movable device. 2 At least one support device among the plurality of support devices provided on the superconducting magnet is connected to a support rod that supports the superconducting magnet, a moving means that moves the support rod, and a means that is provided in the cold container and that is connected to the support rod. The superconducting magnet device according to claim 1, characterized in that the superconducting magnet device comprises a bellows member that interlocks with each other. 3. A patent characterized in that an inner tank and an outer tank are formed of bellows to connect the passages between the cold storage containers, and a radiation shield plate is provided between the inner tank and the outer tank, and a sliding part is provided on the radiation shield plate. A superconducting magnet device according to claim 1.