JPS61190137U - - Google Patents
Info
- Publication number
- JPS61190137U JPS61190137U JP7559285U JP7559285U JPS61190137U JP S61190137 U JPS61190137 U JP S61190137U JP 7559285 U JP7559285 U JP 7559285U JP 7559285 U JP7559285 U JP 7559285U JP S61190137 U JPS61190137 U JP S61190137U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- chamber doors
- processing apparatus
- machine head
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7559285U JPS61190137U (OSRAM) | 1985-05-21 | 1985-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7559285U JPS61190137U (OSRAM) | 1985-05-21 | 1985-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61190137U true JPS61190137U (OSRAM) | 1986-11-27 |
Family
ID=30616954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7559285U Pending JPS61190137U (OSRAM) | 1985-05-21 | 1985-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61190137U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02152251A (ja) * | 1988-12-03 | 1990-06-12 | Furendotetsuku Kenkyusho:Kk | 縦型半導体製造システム |
-
1985
- 1985-05-21 JP JP7559285U patent/JPS61190137U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02152251A (ja) * | 1988-12-03 | 1990-06-12 | Furendotetsuku Kenkyusho:Kk | 縦型半導体製造システム |