JPS61190136U - - Google Patents

Info

Publication number
JPS61190136U
JPS61190136U JP7421785U JP7421785U JPS61190136U JP S61190136 U JPS61190136 U JP S61190136U JP 7421785 U JP7421785 U JP 7421785U JP 7421785 U JP7421785 U JP 7421785U JP S61190136 U JPS61190136 U JP S61190136U
Authority
JP
Japan
Prior art keywords
wafer
support plate
side support
back side
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7421785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7421785U priority Critical patent/JPS61190136U/ja
Publication of JPS61190136U publication Critical patent/JPS61190136U/ja
Pending legal-status Critical Current

Links

JP7421785U 1985-05-21 1985-05-21 Pending JPS61190136U (US06330241-20011211-M00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7421785U JPS61190136U (US06330241-20011211-M00004.png) 1985-05-21 1985-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7421785U JPS61190136U (US06330241-20011211-M00004.png) 1985-05-21 1985-05-21

Publications (1)

Publication Number Publication Date
JPS61190136U true JPS61190136U (US06330241-20011211-M00004.png) 1986-11-27

Family

ID=30614307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7421785U Pending JPS61190136U (US06330241-20011211-M00004.png) 1985-05-21 1985-05-21

Country Status (1)

Country Link
JP (1) JPS61190136U (US06330241-20011211-M00004.png)

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