JPS61190130U - - Google Patents
Info
- Publication number
- JPS61190130U JPS61190130U JP7356385U JP7356385U JPS61190130U JP S61190130 U JPS61190130 U JP S61190130U JP 7356385 U JP7356385 U JP 7356385U JP 7356385 U JP7356385 U JP 7356385U JP S61190130 U JPS61190130 U JP S61190130U
- Authority
- JP
- Japan
- Prior art keywords
- resist coating
- semiconductor wafer
- cup
- adjustment means
- temperature adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000112 cooling gas Substances 0.000 claims 1
- 239000000498 cooling water Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7356385U JPS61190130U (fi) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7356385U JPS61190130U (fi) | 1985-05-20 | 1985-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61190130U true JPS61190130U (fi) | 1986-11-27 |
Family
ID=30613052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7356385U Pending JPS61190130U (fi) | 1985-05-20 | 1985-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61190130U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02307568A (ja) * | 1989-05-22 | 1990-12-20 | Nec Corp | 塗布剤の塗布方法及びその装置 |
-
1985
- 1985-05-20 JP JP7356385U patent/JPS61190130U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02307568A (ja) * | 1989-05-22 | 1990-12-20 | Nec Corp | 塗布剤の塗布方法及びその装置 |