JPS61190128U - - Google Patents
Info
- Publication number
- JPS61190128U JPS61190128U JP7356585U JP7356585U JPS61190128U JP S61190128 U JPS61190128 U JP S61190128U JP 7356585 U JP7356585 U JP 7356585U JP 7356585 U JP7356585 U JP 7356585U JP S61190128 U JPS61190128 U JP S61190128U
- Authority
- JP
- Japan
- Prior art keywords
- support rods
- groove
- pair
- inclination
- horizontal plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7356585U JPS61190128U (de) | 1985-05-20 | 1985-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7356585U JPS61190128U (de) | 1985-05-20 | 1985-05-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61190128U true JPS61190128U (de) | 1986-11-27 |
Family
ID=30613056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7356585U Pending JPS61190128U (de) | 1985-05-20 | 1985-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61190128U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07211689A (ja) * | 1994-01-18 | 1995-08-11 | Shin Etsu Handotai Co Ltd | ウェーハホルダー |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5599719A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
-
1985
- 1985-05-20 JP JP7356585U patent/JPS61190128U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5599719A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Heat treatment jig of wafer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07211689A (ja) * | 1994-01-18 | 1995-08-11 | Shin Etsu Handotai Co Ltd | ウェーハホルダー |