JPS61189257U - - Google Patents
Info
- Publication number
- JPS61189257U JPS61189257U JP7405785U JP7405785U JPS61189257U JP S61189257 U JPS61189257 U JP S61189257U JP 7405785 U JP7405785 U JP 7405785U JP 7405785 U JP7405785 U JP 7405785U JP S61189257 U JPS61189257 U JP S61189257U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- electrode
- coil part
- power supply
- noble metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 229910000510 noble metal Inorganic materials 0.000 claims 2
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は実施例に用いるガスセンサの断面図、
第２図はその平面図、第３図は実施例の回路図、
第４図〜第５図は実施例の特性図である。
図において、２…ガスセンサ、４…ヒータ兼用
電極、６…検出電極、ＥＢ…ヒータ電源、ＲＬ…
検出抵抗。
Figure 1 is a cross-sectional view of the gas sensor used in the example.
Fig. 2 is a plan view thereof, Fig. 3 is a circuit diagram of the embodiment,
4 and 5 are characteristic diagrams of the embodiment. In the figure, 2...gas sensor, 4...heater electrode, 6...detection electrode, EB...heater power supply, RL...
Detection resistor.
Claims (1)
前記コイル部の１端から内部へコイル部の長さの
５０〜８５％だけ挿入された貴金属の検出電極と
、 ヒータ兼用電極のコイル部を埋設したガス敏感
性金属酸化物半導体の多孔質成形体、 とを有するガスセンサと、 このガスセンサのヒータ兼用電極の両端に接続
したヒータ電源と、 ヒータ電源の一端と検出電極との間に接続した
検出抵抗、 とを有するガス検出装置。[Claims for Utility Model Registration] A noble metal heater electrode having a coil portion,
A porous molded body of a gas-sensitive metal oxide semiconductor in which a detection electrode made of a noble metal is inserted from one end of the coil part into the inside by 50 to 85% of the length of the coil part, and a coil part of a heater electrode is embedded. , a heater power supply connected to both ends of a heater electrode of the gas sensor, and a detection resistor connected between one end of the heater power supply and the detection electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7405785U JPS61189257U (en) | 1985-05-17 | 1985-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7405785U JPS61189257U (en) | 1985-05-17 | 1985-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61189257U true JPS61189257U (en) | 1986-11-26 |
Family
ID=30614001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7405785U Pending JPS61189257U (en) | 1985-05-17 | 1985-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61189257U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013130441A (en) * | 2011-12-21 | 2013-07-04 | Fis Inc | Semiconductor gas sensor element, manufacturing method of semiconductor gas sensor element and gas detection device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5035297B1 (en) * | 1971-04-15 | 1975-11-14 | ||
| JPS52111798A (en) * | 1976-03-16 | 1977-09-19 | Tokai Konetsu Kogyo Kk | Improvement of gas sensing device |
-
1985
- 1985-05-17 JP JP7405785U patent/JPS61189257U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5035297B1 (en) * | 1971-04-15 | 1975-11-14 | ||
| JPS52111798A (en) * | 1976-03-16 | 1977-09-19 | Tokai Konetsu Kogyo Kk | Improvement of gas sensing device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013130441A (en) * | 2011-12-21 | 2013-07-04 | Fis Inc | Semiconductor gas sensor element, manufacturing method of semiconductor gas sensor element and gas detection device |
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