JPS61189006U - - Google Patents

Info

Publication number
JPS61189006U
JPS61189006U JP1305685U JP1305685U JPS61189006U JP S61189006 U JPS61189006 U JP S61189006U JP 1305685 U JP1305685 U JP 1305685U JP 1305685 U JP1305685 U JP 1305685U JP S61189006 U JPS61189006 U JP S61189006U
Authority
JP
Japan
Prior art keywords
storage container
substrate storage
jig
contact portion
transportation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1305685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1305685U priority Critical patent/JPS61189006U/ja
Publication of JPS61189006U publication Critical patent/JPS61189006U/ja
Pending legal-status Critical Current

Links

JP1305685U 1985-01-31 1985-01-31 Pending JPS61189006U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1305685U JPS61189006U (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1305685U JPS61189006U (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Publications (1)

Publication Number Publication Date
JPS61189006U true JPS61189006U (enrdf_load_stackoverflow) 1986-11-25

Family

ID=30496703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1305685U Pending JPS61189006U (enrdf_load_stackoverflow) 1985-01-31 1985-01-31

Country Status (1)

Country Link
JP (1) JPS61189006U (enrdf_load_stackoverflow)

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