JPS6118886B2 - - Google Patents
Info
- Publication number
- JPS6118886B2 JPS6118886B2 JP13712077A JP13712077A JPS6118886B2 JP S6118886 B2 JPS6118886 B2 JP S6118886B2 JP 13712077 A JP13712077 A JP 13712077A JP 13712077 A JP13712077 A JP 13712077A JP S6118886 B2 JPS6118886 B2 JP S6118886B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode structure
- piezoelectric vibrator
- tuning fork
- electrode
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000005684 electric field Effects 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000005394 sealing glass Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明は、腕時計等に使用される、小型の圧電
振動子ユニツトに関する。更に詳しくは、音叉型
に切り出されたLiTaO3の電極構造に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a small piezoelectric vibrator unit used in wristwatches and the like. More specifically, the present invention relates to an electrode structure of LiTaO 3 cut into a tuning fork shape.
電子腕時計に用いられる圧電振動子は、一般的
には、水晶を原料とした水晶振動子を使用してい
るが、最近、小型化の要請に応じて、LiTaO3が
圧電振動子材料として注目されている。LiTaO3
は、高結合系数、低機械損失、高安定度をもつば
かりでなく共振周波数の零温度系数をもつてい
る。したがつて、振動子を小型化する上で、非常
に有利である。しかし、LiTaO3は、前記のよう
に優れた特徴をもつていながら、製造技術がとも
なわず高価になつてしまい、量産化するには、問
題があつた。 Piezoelectric resonators used in electronic watches generally use crystal resonators made from quartz crystal, but recently, in response to the demand for miniaturization, LiTaO 3 has attracted attention as a piezoelectric resonator material. ing. LiTaO 3
not only has a high coupling coefficient, low mechanical loss, and high stability, but also has a zero-temperature coefficient at the resonant frequency. Therefore, it is very advantageous in reducing the size of the vibrator. However, although LiTaO 3 has the above-mentioned excellent characteristics, it is expensive due to lack of manufacturing technology, and there are problems in mass producing it.
本発明は、かかる欠点について、改善し、小型
で比較的安価な、LiTaO3振動子を提供する。 The present invention improves these drawbacks and provides a small and relatively inexpensive LiTaO 3 resonator.
以下具体的実施例について、図により説明す
る。第１図ａは、本実施例、LiTaO3振動子の原
石からの切りだし角度を示し、常温に零温度系数
温度がくるように、Ｘ軸を回転軸として、XY面
を＋50゜前後傾むけてLiTaO3板１を切り出し、
その後、前記板面１上に１図ｂのようにＹ方向に
２本の音叉足がくるように音叉型LiTaO3２を機
械加工する。その後、第２図ａに示すように、メ
タルマスクと蒸着等の薄膜技術により、音叉型
LiTaO3２の表裏各々の基部同一平面上に２極の
電極ターミナル３ａ，３ｂを設け、かつ、電極４
ａ，４ｂを設ける。合せて表裏の接続を側面で行
なう。前記電極構造及び、側面の接続方式を更に
詳しく説明すると、音叉型LiTaO3の基部にある
一方の極は、電極ターミナル３ａより出してから
２本の電極になり、左右に分かれ各々音叉足の中
心より外側に配置され、一方は所定の位置でとま
り、一方は所定の位置より水晶の側面を接続手段
として、裏面にまわり足の中心より内側に音叉の
又を中心に対向して配置される。又、電極ターミ
ナル３ａは基部側面をとうり裏面の電極ターミナ
ルとなる。又一方の極は、上記説明と同じで、表
裏のみちがうだけである。したがつて、表裏の電
極は、ほぼ同じ形状をしている。又、第２図ｂに
示すように、振動部に於いては、板厚断面の対向
する電極は異極となる。以上のようにして、加工
された音叉型LiTaO3は、例えば、第３図に示す
ような、チユブ型容器のプラグ枠７を貫通し、封
着ガラス５により絶縁気密封止されている２本の
りード端子６に、同一平面上にある電極ターミナ
ル３ａ，３ｂを夫々ハンダ等の接続手段により支
持し、N2ガス及び真空等の雰囲気中で気密封止
し、音叉型LiTaO3振動子ユニツトとして完成す
る。 Specific examples will be described below with reference to the drawings. Figure 1a shows the angle at which the LiTaO 3 vibrator of this example was cut from the raw stone.The XY plane was tilted around +50° with the X axis as the rotation axis so that the zero temperature series temperature was at room temperature. Cut out LiTaO 3 board 1,
Thereafter, the tuning fork-shaped LiTaO 3 2 is machined on the plate surface 1 so that two tuning fork feet are arranged in the Y direction as shown in FIG. 1b. After that, as shown in Figure 2a, a tuning fork shape was created using metal masks and thin film techniques such as vapor deposition.
Two electrode terminals 3a and 3b are provided on the same plane at the base of each of the front and back sides of LiTaO 3 2, and the electrode 4
a and 4b are provided. At the same time, connect the front and back sides on the sides. To explain the electrode structure and side connection method in more detail, one pole at the base of the tuning fork-shaped LiTaO 3 becomes two electrodes after coming out from the electrode terminal 3a, and is divided into left and right parts, each connected to the center of the tuning fork foot. One is placed on the outside, and one is fixed at a predetermined position, and the other is placed on the back of the foot from a predetermined position, using the side surface of the crystal as a connection means, and is placed on the inside of the center of the foot, facing each other around the prongs of the tuning fork. Further, the electrode terminal 3a passes through the side surface of the base and becomes an electrode terminal on the back surface. Also, one pole is the same as described above, only the front and back sides are different. Therefore, the front and back electrodes have almost the same shape. Further, as shown in FIG. 2b, in the vibrating section, electrodes facing each other in the cross section of the plate have different polarities. As shown in FIG. 3, the tuned fork-shaped LiTaO 3 processed in the above manner is made into two pieces that pass through the plug frame 7 of the tube-shaped container and are hermetically sealed with the sealing glass 5. The electrode terminals 3a and 3b on the same plane are supported on the lead terminal 6 by connecting means such as solder, and hermetically sealed in an atmosphere such as N 2 gas or vacuum, and a tuning fork type LiTaO 3 resonator unit is formed. Completed as.
本発明によれば、電極形成及び表裏の接続が金
属マスクを用いた蒸着等の薄膜技術で容易に形成
でき、又、第２図に示すように音叉型の基部同一
平面上に２極の電極ターミナルが容易となるた
め、第３図に示すようなチユーブ型容器からでる
２端子に直接接続することができる。又表裏の電
極構造、電極ターミナルが同一形状なので表裏選
別が不要で、実装上非常に有利である。以上のよ
うなことから本発明により総合的に安価な
LiTaO3振動子ユニツトが製造できる。尚、本実
施例はLiTaO3振動子について述べたが、同様な
電極構造で良いLiNbO3等の圧電振動子も同様な
ことが云える。 According to the present invention, electrode formation and connection between the front and back sides can be easily formed by thin film technology such as vapor deposition using a metal mask, and as shown in FIG. Since the terminal is easy, it can be directly connected to two terminals coming out of a tube-shaped container as shown in FIG. In addition, since the front and back electrode structures and electrode terminals have the same shape, there is no need to separate the front and back sides, which is very advantageous in terms of mounting. From the above, the present invention provides an overall inexpensive solution.
LiTaO 3- oscillator unit can be manufactured. Although this embodiment has been described with respect to a LiTaO 3 vibrator, the same can be said of piezoelectric vibrators such as LiNbO 3 which may have a similar electrode structure.
第１図ａは、本発明に使用されるLiTaO3ブラ
ンクのカツトアングルを示す。第１図ｂは、前記
ブランクより切り出される音叉型の位置を示す。
第２図ａは、本発明の電極構造であり、第２図ｂ
は、前記電極構造からなるLiTaO3振動子の振動
断面図を示す。第３図は、本発明LiTaO3振動子
をチユーブ型容器に実装した図である。
１……LiTaO3ブランク、２……LiTaO3音叉、
３ａ，３ｂ……電極ターミナル、４ａ，４ｂ……
電極、５……封着ガラス、６……リード端子、７
……プラグ枠。
Figure 1a shows the cut angle of the LiTaO 3 blank used in the present invention. FIG. 1b shows the position of the tuning fork shape cut out from the blank.
Figure 2a shows the electrode structure of the present invention, and Figure 2b
shows a vibration cross-sectional view of a LiTaO 3 vibrator having the above electrode structure. FIG. 3 is a diagram in which the LiTaO 3 vibrator of the present invention is mounted in a tube-shaped container. 1...LiTaO 3 blank, 2...LiTaO 3 tuning fork,
3a, 3b... Electrode terminal, 4a, 4b...
Electrode, 5... Sealing glass, 6... Lead terminal, 7
...Plug frame.
Claims (1)
振動子の対向する２平面には、該振動子の厚み方
固に電界を印加すべく、それぞれ２つの極性の電
極膜が付与されており、前記２平面の同極の電極
接続が、前記振動子の側面により接続されている
ことを特徴とする圧電振動子の電極構造。 ２ 特許請求の範囲第１項記載の圧電振動子の電
極構造において、側面の接続は、音叉の内側にあ
る一方の極より、音叉の足端部を横断し側面の接
続部に至ることを特徴とする圧電振動子の電極構
造。 ３ 特許請求の範囲第１項記載の圧電振動子の電
極構造において、圧電振動子は、LiTaO3等、電
気的機械結合系数の大きい圧電材であることを特
徴とする圧電振動子の電極構造。 ４ 特許請求の範囲第２項記載の圧電振動子の電
極構造において、音叉の基部同一平面上に、異極
である２極の電極ターミナルを設けたことを特徴
とする圧電振動子の電極構造。 ５ 特許請求の範囲第１項記載の圧電振動子の電
極構造において、対向する音叉表裏の電極形状
は、ほぼ同じ形状をしており、かつ、２本の音叉
足の同一面の各々の電極構造は、足の端部で異な
つていることを特徴とする圧電振動子の電極構
造。[Claims] 1. In a piezoelectric vibrator having the shape of a flat tuning fork, two polar electrodes are provided on two opposing planes of the vibrator, respectively, in order to apply an electric field to the thickness of the vibrator. 1. An electrode structure for a piezoelectric vibrator, characterized in that a membrane is provided, and the electrode connections of the same polarity on the two planes are connected by a side surface of the vibrator. 2. In the electrode structure of a piezoelectric vibrator according to claim 1, the connection on the side surface starts from one pole located inside the tuning fork, crosses the foot end of the tuning fork, and reaches the connection portion on the side surface. Electrode structure of piezoelectric vibrator. 3. The electrode structure of a piezoelectric vibrator according to claim 1, wherein the piezoelectric vibrator is made of a piezoelectric material having a large electromechanical coupling coefficient, such as LiTaO 3 . 4. An electrode structure for a piezoelectric vibrator according to claim 2, characterized in that two electrode terminals of different polarities are provided on the same plane at the base of the tuning fork. 5. In the electrode structure of the piezoelectric vibrator described in claim 1, the electrode shapes on the front and back sides of the opposing tuning forks have substantially the same shape, and each electrode structure on the same surface of the two tuning fork feet has the same shape. is an electrode structure of a piezoelectric vibrator that is characterized by a different electrode structure at the end of the foot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13712077A JPS5469987A (en) | 1977-11-15 | 1977-11-15 | Electrode structure of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13712077A JPS5469987A (en) | 1977-11-15 | 1977-11-15 | Electrode structure of piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5469987A JPS5469987A (en) | 1979-06-05 |
| JPS6118886B2 true JPS6118886B2 (en) | 1986-05-14 |
Family
ID=15191282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13712077A Granted JPS5469987A (en) | 1977-11-15 | 1977-11-15 | Electrode structure of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5469987A (en) |
-
1977
- 1977-11-15 JP JP13712077A patent/JPS5469987A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5469987A (en) | 1979-06-05 |
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