JPS61187374U - - Google Patents
Info
- Publication number
- JPS61187374U JPS61187374U JP7061285U JP7061285U JPS61187374U JP S61187374 U JPS61187374 U JP S61187374U JP 7061285 U JP7061285 U JP 7061285U JP 7061285 U JP7061285 U JP 7061285U JP S61187374 U JPS61187374 U JP S61187374U
- Authority
- JP
- Japan
- Prior art keywords
- target
- exposed part
- plate
- target material
- shield plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003628 erosive effect Effects 0.000 claims description 2
- 239000013077 target material Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000005477 sputtering target Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7061285U JPS61187374U (tr) | 1985-05-15 | 1985-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7061285U JPS61187374U (tr) | 1985-05-15 | 1985-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61187374U true JPS61187374U (tr) | 1986-11-21 |
Family
ID=30607350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7061285U Pending JPS61187374U (tr) | 1985-05-15 | 1985-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61187374U (tr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002004040A (ja) * | 2000-06-16 | 2002-01-09 | Anelva Corp | 高周波スパッタリング装置 |
| JP2007238978A (ja) * | 2006-03-06 | 2007-09-20 | Dainippon Printing Co Ltd | スパッタ装置およびスパッタ方法 |
-
1985
- 1985-05-15 JP JP7061285U patent/JPS61187374U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002004040A (ja) * | 2000-06-16 | 2002-01-09 | Anelva Corp | 高周波スパッタリング装置 |
| JP4656697B2 (ja) * | 2000-06-16 | 2011-03-23 | キヤノンアネルバ株式会社 | 高周波スパッタリング装置 |
| JP2007238978A (ja) * | 2006-03-06 | 2007-09-20 | Dainippon Printing Co Ltd | スパッタ装置およびスパッタ方法 |
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