JPS61187374U - - Google Patents

Info

Publication number
JPS61187374U
JPS61187374U JP7061285U JP7061285U JPS61187374U JP S61187374 U JPS61187374 U JP S61187374U JP 7061285 U JP7061285 U JP 7061285U JP 7061285 U JP7061285 U JP 7061285U JP S61187374 U JPS61187374 U JP S61187374U
Authority
JP
Japan
Prior art keywords
target
exposed part
plate
target material
shield plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7061285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7061285U priority Critical patent/JPS61187374U/ja
Publication of JPS61187374U publication Critical patent/JPS61187374U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7061285U 1985-05-15 1985-05-15 Pending JPS61187374U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7061285U JPS61187374U (en:Method) 1985-05-15 1985-05-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7061285U JPS61187374U (en:Method) 1985-05-15 1985-05-15

Publications (1)

Publication Number Publication Date
JPS61187374U true JPS61187374U (en:Method) 1986-11-21

Family

ID=30607350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7061285U Pending JPS61187374U (en:Method) 1985-05-15 1985-05-15

Country Status (1)

Country Link
JP (1) JPS61187374U (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002004040A (ja) * 2000-06-16 2002-01-09 Anelva Corp 高周波スパッタリング装置
JP2007238978A (ja) * 2006-03-06 2007-09-20 Dainippon Printing Co Ltd スパッタ装置およびスパッタ方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002004040A (ja) * 2000-06-16 2002-01-09 Anelva Corp 高周波スパッタリング装置
JP2007238978A (ja) * 2006-03-06 2007-09-20 Dainippon Printing Co Ltd スパッタ装置およびスパッタ方法

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