JPS61186242U - - Google Patents
Info
- Publication number
- JPS61186242U JPS61186242U JP1985071682U JP7168285U JPS61186242U JP S61186242 U JPS61186242 U JP S61186242U JP 1985071682 U JP1985071682 U JP 1985071682U JP 7168285 U JP7168285 U JP 7168285U JP S61186242 U JPS61186242 U JP S61186242U
- Authority
- JP
- Japan
- Prior art keywords
- holding tool
- support tube
- handling
- wafer
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985071682U JPS61186242U (enExample) | 1985-05-13 | 1985-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985071682U JPS61186242U (enExample) | 1985-05-13 | 1985-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61186242U true JPS61186242U (enExample) | 1986-11-20 |
Family
ID=30609396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985071682U Pending JPS61186242U (enExample) | 1985-05-13 | 1985-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61186242U (enExample) |
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1985
- 1985-05-13 JP JP1985071682U patent/JPS61186242U/ja active Pending