JPS61186242U - - Google Patents

Info

Publication number
JPS61186242U
JPS61186242U JP7168285U JP7168285U JPS61186242U JP S61186242 U JPS61186242 U JP S61186242U JP 7168285 U JP7168285 U JP 7168285U JP 7168285 U JP7168285 U JP 7168285U JP S61186242 U JPS61186242 U JP S61186242U
Authority
JP
Japan
Prior art keywords
holding tool
support tube
handling
wafer
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7168285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7168285U priority Critical patent/JPS61186242U/ja
Publication of JPS61186242U publication Critical patent/JPS61186242U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP7168285U 1985-05-13 1985-05-13 Pending JPS61186242U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7168285U JPS61186242U (enrdf_load_stackoverflow) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7168285U JPS61186242U (enrdf_load_stackoverflow) 1985-05-13 1985-05-13

Publications (1)

Publication Number Publication Date
JPS61186242U true JPS61186242U (enrdf_load_stackoverflow) 1986-11-20

Family

ID=30609396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7168285U Pending JPS61186242U (enrdf_load_stackoverflow) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPS61186242U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPH0371641U (enrdf_load_stackoverflow)
JPS61186242U (enrdf_load_stackoverflow)
JPS61154689U (enrdf_load_stackoverflow)
JPS63178335U (enrdf_load_stackoverflow)
JPS6197841U (enrdf_load_stackoverflow)
JPS6333632U (enrdf_load_stackoverflow)
JPH03109340U (enrdf_load_stackoverflow)
JPH0184435U (enrdf_load_stackoverflow)
JPH0291346U (enrdf_load_stackoverflow)
JPS6382941U (enrdf_load_stackoverflow)
JPH0317632U (enrdf_load_stackoverflow)
JPH0420225U (enrdf_load_stackoverflow)
JPH0320438U (enrdf_load_stackoverflow)
JPS5868029U (ja) 半導体ウエ−ハ用キヤリヤの搬送用ハンドル
JPS6260029U (enrdf_load_stackoverflow)
JPH01129824U (enrdf_load_stackoverflow)
JPS6377344U (enrdf_load_stackoverflow)
JPS6413131U (enrdf_load_stackoverflow)
JPH0425231U (enrdf_load_stackoverflow)
JPS6333630U (enrdf_load_stackoverflow)
JPS6171366U (enrdf_load_stackoverflow)
JPS63193374U (enrdf_load_stackoverflow)
JPH0388334U (enrdf_load_stackoverflow)
JPS61199044U (enrdf_load_stackoverflow)
JPS63172200U (enrdf_load_stackoverflow)