JPS61186234U - - Google Patents

Info

Publication number

JPS61186234U

JPS61186234U JP6919685U JP6919685U JPS61186234U JP S61186234 U JPS61186234 U JP S61186234U JP 6919685 U JP6919685 U JP 6919685U JP 6919685 U JP6919685 U JP 6919685U JP S61186234 U JPS61186234 U JP S61186234U

Authority

JP

Japan

Prior art keywords

electrode

chamber

dry etching

electrodes

air supply

Prior art date

1985-05-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001312 dry etching Methods 0.000 claims description 4
• 239000012495 reaction gas Substances 0.000 claims 1
• 230000008878 coupling Effects 0.000 description 2
• 238000010168 coupling process Methods 0.000 description 2
• 238000005859 coupling reaction Methods 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 1