JPS61185589U - - Google Patents

Info

Publication number

JPS61185589U

JPS61185589U JP6734085U JP6734085U JPS61185589U JP S61185589 U JPS61185589 U JP S61185589U JP 6734085 U JP6734085 U JP 6734085U JP 6734085 U JP6734085 U JP 6734085U JP S61185589 U JPS61185589 U JP S61185589U

Authority

JP

Japan

Prior art keywords

electron beam

jig

convergence position

detecting

detection member

Prior art date

1985-05-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 12
• 238000010894 electron beam technology Methods 0.000 claims description 6
• 230000008018 melting Effects 0.000 description 3
• 238000002844 melting Methods 0.000 description 3
• 238000010586 diagram Methods 0.000 description 1