JPS6118476A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS6118476A JPS6118476A JP13948984A JP13948984A JPS6118476A JP S6118476 A JPS6118476 A JP S6118476A JP 13948984 A JP13948984 A JP 13948984A JP 13948984 A JP13948984 A JP 13948984A JP S6118476 A JPS6118476 A JP S6118476A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- layer
- electrode layer
- nickel
- piezoelectric vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、例えば超音波加湿器の超音波振動子等として
利用するのに好適な圧電振動子に関する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a piezoelectric vibrator suitable for use as an ultrasonic vibrator of an ultrasonic humidifier, for example.
従来技術
従来のこの種の圧電振動子は１例えば第４図に例示する
ように、圧電磁器素体ｌの表面に、銀を主成分とする第
１電極層２を設けると共に、この第１電極層２に２する
保護膜として、銀以外の金属を主成分とする第２電極層
３を設けた二層構造となっていた。前記第１電極層２は
特性の向上及び安定化等の観点から、通常、銀焼付は電
極として形成される。第２電極層３は第１電極層２に対
する保護層として耐酸化性、寿命特性等を向上させるた
めに設けられたもので、Ｎｉメッキ等によって形成され
る。PRIOR ART A conventional piezoelectric vibrator of this type is provided with a first electrode layer 2 mainly composed of silver on the surface of a piezoelectric ceramic body l, as illustrated in FIG. It had a two-layer structure in which a second electrode layer 3 containing a metal other than silver as a main component was provided as a protective film on layer 2. The first electrode layer 2 is usually formed by baking silver as an electrode from the viewpoint of improving and stabilizing the characteristics. The second electrode layer 3 is provided as a protective layer for the first electrode layer 2 in order to improve oxidation resistance, life characteristics, etc., and is formed by Ni plating or the like.
なお、超音波加湿器の超音波振動子として利用する場合
には、前述の２層構造で成る電極（イ）、（ロ）を圧電
磁器素体１の相対向する両面にそれぞれ形成し、電極（
イ）のある面側を超音波放射面として利用する。When used as an ultrasonic vibrator in an ultrasonic humidifier, the electrodes (a) and (b) having the aforementioned two-layer structure are formed on opposite surfaces of the piezoelectric ceramic body 1, and the electrodes are (
Use the side with b) as the ultrasonic emission surface.
従来技術の欠点
しかし、Ｎｉメッキ等で成る第２電極層３を最外層とす
る従来構造では耐酸性が低く、酢酸等による腐食試験を
行なった場合、１００時間程度で腐食されてしまう、ま
た、耐酸性及び耐薬品性が低いため、超音波加湿器の超
音波振動子として使用した場合等に、電極表面に付着し
た水垢除去を行なう際には、酸洗いや薬品洗浄等を行な
うことができず、充分な洗浄効果を得ることが困難であ
った。Disadvantages of the prior art However, the conventional structure in which the second electrode layer 3 made of Ni plating or the like is the outermost layer has low acid resistance, and when a corrosion test with acetic acid or the like is conducted, it corrodes in about 100 hours. Due to its low acid and chemical resistance, pickling or chemical cleaning cannot be used to remove limescale adhering to the electrode surface when used as an ultrasonic vibrator in an ultrasonic humidifier. However, it was difficult to obtain a sufficient cleaning effect.
本発明の目的
本発明ｔ１上述する従来からの問題点を解決し、耐酸性
及び耐薬品性に優れた電極を持ち、超音波加湿器の超音
波振動子等に使用するのに好適、な圧電振動子を提供す
ることを目的とする。Purpose of the present invention The present invention t1 A piezoelectric material which solves the conventional problems mentioned above, has an electrode with excellent acid resistance and chemical resistance, and is suitable for use in an ultrasonic vibrator of an ultrasonic humidifier, etc. The purpose is to provide a vibrator.
本発明の＃Ｉ成
上記目的を達成するため、本発明に係る圧電振動子は、
表層がニッケル不働態皮膜で成る電極を有することを特
徴とする。In order to achieve the above object of #I of the present invention, the piezoelectric vibrator according to the present invention has the following features:
It is characterized by having an electrode whose surface layer is made of a nickel passive film.
実施例
第１図は本発明に係る圧電振動子の正面断面図、第２図
は同じくその底面図、第３図は電極部分の拡大断面図で
ある０図において、第４図と同一の参照符号は同一性あ
る構成部分を示す、この実施例では、圧電磁器素体ｌの
表面に銀を主成分とする第１電極層２を形成し、この第
１電極層２の上にニッケルを主成分とする第２電極層３
を形成し、この第２電極層３の上にニッケル不働態皮膜
４を形成しである。Embodiment FIG. 1 is a front sectional view of a piezoelectric vibrator according to the present invention, FIG. 2 is a bottom view thereof, and FIG. 3 is an enlarged sectional view of an electrode portion. In this example, a first electrode layer 2 containing silver as a main component is formed on the surface of a piezoelectric ceramic body 1, and a layer containing nickel as a main component is formed on the first electrode layer 2. Second electrode layer 3 as a component
A nickel passive film 4 is formed on the second electrode layer 3.
第１電極層２は従来と同様に銀焼付けによって形成し、
第２電極層３はニッケルメッキによって形成する。ニッ
ケル不働態皮膜４はこのようにして形成された第２電極
層３のニッケルメッキ層に対し、塩酸或いは硫酸等で表
面処理を施すことによって形成される。従って、ニッケ
ル不働態皮膜４は表面処理程度の厚み、例えば０．１７
Ｌｍ〜２．５ｇｍの層厚となり、第２電極層３を構成す
るニッケルメッキ層の略５０％程度の層厚となる。なお
、第１電極層２は５Ｂｍ 〜２５ＪＬｍ、第２電極層３
は０．２ｇｍ〜５７Ｌｍ程度となるように形成するのが
望ましい。The first electrode layer 2 is formed by silver baking as in the conventional case,
The second electrode layer 3 is formed by nickel plating. The nickel passive film 4 is formed by subjecting the thus formed nickel plating layer of the second electrode layer 3 to a surface treatment with hydrochloric acid, sulfuric acid, or the like. Therefore, the nickel passive film 4 has a thickness equivalent to that of surface treatment, for example, 0.17 mm.
The layer thickness is Lm to 2.5 gm, which is approximately 50% of the thickness of the nickel plating layer constituting the second electrode layer 3. Note that the first electrode layer 2 has a thickness of 5 Bm to 25 JLm, and the second electrode layer 3 has a thickness of 5 Bm to 25 JLm.
It is desirable to form it so that it is about 0.2 gm to 57 Lm.
電極の表面皮膜を構成するニッケル不働態皮膜４は無定
形（非晶質）であり、非常にち密で密着性のよい柔軟な
構造をとり、金属イオンの金属から溶液への移動を妨げ
、金属イオン移動の障壁となる。このため、従来のニッ
ケルメッキ層の場合に比べて、耐酸化性及び耐薬品性が
著しく向上し、超音波加湿器の超音波振動子として使用
した場合などに、ニッケル不働態皮膜４の表面に付着し
た水垢等を、酸洗いや薬品洗浄等によって行なうことが
可能になり、充分な洗浄効果を得ることができるように
なる。The nickel passive film 4 that constitutes the surface film of the electrode is amorphous and has a flexible structure that is very dense and has good adhesion, and prevents the movement of metal ions from the metal to the solution. It acts as a barrier to ion movement. Therefore, compared to the conventional nickel plating layer, oxidation resistance and chemical resistance are significantly improved, and when used as an ultrasonic vibrator in an ultrasonic humidifier, the surface of the nickel passive film 4 It becomes possible to remove attached limescale and the like by acid washing, chemical cleaning, etc., and it becomes possible to obtain a sufficient cleaning effect.
この実施例では、圧電磁器素体ｌの厚さ方向の両面に形
成される電極（イ）、（ロ）の両者とも１表層をニッケ
ル不働態皮＠４としであるが、超音波加湿器の超音波振
動子として利用する場合に超音波放射面となる電極（イ
）のみを、その表層をニッケル不働態皮膜４としても良
い。また、電極の表層がニッケル不Ｓ態皮Ｍ４となって
いれば本発明の範囲内であり、電極の他の構造は、実施
例に限定されないことは言うまでもない。In this example, one surface layer of both electrodes (a) and (b) formed on both sides of the piezoelectric ceramic body l in the thickness direction is made of nickel passive skin @4. When used as an ultrasonic transducer, only the electrode (a) which becomes an ultrasonic radiation surface may have a nickel passive film 4 on its surface layer. Further, it is within the scope of the present invention as long as the surface layer of the electrode is a nickel S-type skin M4, and it goes without saying that other structures of the electrode are not limited to the examples.
本発明の効果
以上述べたように４本発明は１表層がニッケル不働態皮
膜で成る電極を有することを特徴とするから、ニッケル
不働態皮膜により、金属イオン移動の障壁を形成し、耐
酸性及び耐薬品性に優れた電極構造を持ち、超音波加湿
器の超音波振動子等に使用するのに好適な圧電振動子を
提供することができる。Effects of the present invention As described above, the present invention is characterized by having an electrode whose surface layer is made of a nickel passive film, so that the nickel passive film forms a barrier to metal ion movement and has acid resistance and A piezoelectric vibrator having an electrode structure with excellent chemical resistance and suitable for use in an ultrasonic vibrator of an ultrasonic humidifier, etc. can be provided.
第１図は本発明に係る圧電振動子の正面断面図、第２図
は同じくその底面図、第３図は電極部分の拡大断面図、
第４図は従来の圧電振動子の断面図である。
ｌ・・勢圧電磁器素体 ２・・・第１電極層３−・・第
２電極層
４・・・ニッケル不働態皮膜FIG. 1 is a front sectional view of a piezoelectric vibrator according to the present invention, FIG. 2 is a bottom view thereof, and FIG. 3 is an enlarged sectional view of an electrode portion.
FIG. 4 is a sectional view of a conventional piezoelectric vibrator. l... Force electromagnetic element body 2... First electrode layer 3-... Second electrode layer 4... Nickel passive film
Claims (3)
とを特徴とする圧電振動子。(1) A piezoelectric vibrator characterized by having an electrode whose surface layer is made of a nickel passive film.
に形成された第１電極層と、ニッケルを主成分とし前記
第１電極層の上に形成された第２電極層と、この第２電
極層の上に形成されたニッケル不働態皮膜とで構成され
ることを特徴とする特許請求の範囲第１項に記載の圧電
振動子。(2) The electrode includes a first electrode layer containing silver as a main component and formed on the surface of the piezoelectric ceramic body, and a second electrode layer containing nickel as a main component and formed on the first electrode layer. The piezoelectric vibrator according to claim 1, further comprising a nickel passive film formed on the second electrode layer.
μｍの層厚を有することを特徴とする特許請求の範囲第
１項または第２項に記載の圧電振動子。(3) The nickel passive film has a thickness of 0.1 pm to 2.5 pm.
The piezoelectric vibrator according to claim 1 or 2, characterized in that the piezoelectric vibrator has a layer thickness of μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13948984A JPS6118476A (en) | 1984-07-05 | 1984-07-05 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13948984A JPS6118476A (en) | 1984-07-05 | 1984-07-05 | Piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6118476A true JPS6118476A (en) | 1986-01-27 |
Family
ID=15246447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13948984A Pending JPS6118476A (en) | 1984-07-05 | 1984-07-05 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6118476A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01260243A (en) * | 1988-04-07 | 1989-10-17 | Tdk Corp | Vibrator for ultrasonic humidifier and its manufacture |
| JPH0270600U (en) * | 1988-11-15 | 1990-05-29 | ||
| JPH02218389A (en) * | 1989-02-20 | 1990-08-31 | Matsushita Electric Ind Co Ltd | Needle position detector |
| US20210139727A1 (en) * | 2018-07-18 | 2021-05-13 | Nippon Kayaku Kabushiki Kaisha | Ink composition for inkjet textile printing and textile printing method for hydrophobic fiber |
-
1984
- 1984-07-05 JP JP13948984A patent/JPS6118476A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01260243A (en) * | 1988-04-07 | 1989-10-17 | Tdk Corp | Vibrator for ultrasonic humidifier and its manufacture |
| JPH0270600U (en) * | 1988-11-15 | 1990-05-29 | ||
| JPH02218389A (en) * | 1989-02-20 | 1990-08-31 | Matsushita Electric Ind Co Ltd | Needle position detector |
| US20210139727A1 (en) * | 2018-07-18 | 2021-05-13 | Nippon Kayaku Kabushiki Kaisha | Ink composition for inkjet textile printing and textile printing method for hydrophobic fiber |
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